Lid for functional part and process for producing the same
A manufacturing method and component technology, applied in manufacturing tools, semiconductor/solid-state device parts, electrical components, etc., can solve problems such as inability to bond, and achieve the effects of improving bonding strength, excellent air tightness, and ensuring wettability
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[0064] The manufacturing method of the cap of the present invention is carried out in the method shown in the drawings.
[0065] Figure 1~4 Each process in the manufacturing method of the cap of this invention is demonstrated.
[0066] An example of the lid material sheet used in the manufacturing method of the lid of this example, the plating of the lid, and the solder paste is as follows.
[0067] Cover material plate: Kovar alloy (thickness 0.1mm, width 40mm long shape)
[0068] Plating of the cover material plate: Ni substrate (thickness 0.1 μm), Sn plating (thickness 3 μm), implemented by electroless plating.
[0069] solder paste
[0070] Pure Cu powder (Cu-based metal powder): 27% by mass (average particle size 7 μm)
[0071] Pure Sn powder (lead-free solder powder): 63% by mass (average particle size 10μm)
[0072] Flux: 10% by mass
[0073] Flux composition
[0074] Resin (polymerized rosin) 56% by mass
[0075] Active agent (diphenyl guanidine) 1% by mass
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Abstract
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