Low temperature adsorption method for continuously producing ultra-pure gas

A production method and low-temperature technology, applied in the field of ultra-pure gas production by low-temperature adsorption method, can solve the problems of large loss of liquid nitrogen, difficulty in large-scale production, continuous production, complicated operation process, etc., so as to reduce regeneration operation and cooling loss. Effect

Inactive Publication Date: 2009-09-16
中昊光明化工研究设计院有限公司
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Problems solved by technology

The operation process of this process is relatively complicated, the loss of liquid nitrogen is large, and it is difficult to produce large-scale and continuous production
Therefore, currently this process is only used for processing volumes less than 50Nm 3 / h batch production process

Method used

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  • Low temperature adsorption method for continuously producing ultra-pure gas

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Embodiment Construction

[0023] The following takes the preparation of hydrogen as an example to describe in detail, but the present invention can be applied to the preparation of ultrapure gases such as hydrogen, deuterium, tritium, helium, neon, argon, nitrogen, oxygen, carbon monoxide or methane.

[0024] The raw material hydrogen is electrolytic hydrogen or industrial hydrogen containing low-boiling impurities such as nitrogen, oxygen, argon, carbon monoxide, and carbon dioxide. First, it is deoiled, dehydrated, and high-boiling components are removed, and then it is further purified by low-temperature adsorption. The low temperature adsorption process of the present invention is in figure 1 in the process shown. on the whole, figure 1 Including cooling system and adsorption system two parts.

[0025] figure 1 The cooling system shown is a pre-cooling heat exchanger C, a liquid nitrogen evaporator D and its level gauge E; however, multiples of each device of the present invention may be used. ...

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Abstract

The invention provides a low temperature adsorption method for purifying impurity-containing gas, and continuously producing ultra-pure gas. The method uses liquid nitrogen as cold source, uses liquid nitrogen evaporator to cool raw material gas to required temperature, and uses low temperature adsorption tower group to adsorb to prepare ultra-pure gas with purity more than 6N. In addition, the method also includes cold energy recovery process of product gas and low temperature nitrogen. The method can be used for continuously producing ultra-pure hydrogen, deuterium, tritium, helium, neon, argon, nitrogen, oxygen, carbon monoxide and methane. The invention radically solves defects of directly putting an adsorption tower (column) into a liquid nitrogen groove, and realizes large-scale continuous production of ultra-pure gas.

Description

technical field [0001] The invention relates to a method for preparing ultra-pure gas, more specifically, the invention relates to a process for producing ultra-pure gas by low-temperature adsorption. Background technique [0002] With the development of the electronics industry, especially the rapid industrialization of optoelectronics and microelectronics industries, the demand for some electronic gases is increasing, and the quality requirements are getting higher and higher. The current high-purity gas standard with a purity of 5N (99.999%) and the production scale can no longer meet the actual needs. Therefore, there is an increasing demand for continuous large-scale production of ultra-pure gases with a purity of 6N (99.9999%) or higher. [0003] Using electrolytic hydrogen or industrial hydrogen with a purity of 99.9% as raw material, high-purity hydrogen or ultra-high-purity hydrogen with a purity of 5N-6N can be produced by low-temperature adsorption method. At pre...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01D53/04
Inventor 郭友才
Owner 中昊光明化工研究设计院有限公司
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