Micro PEMFC cathode plate with the capillary drainage structure and its production method

Abstract

The invention discloses the micro PEMFC cathode plate with the capillary drainage structure and its production method which belong to the field of micro-energy and micro-machining technology. Micro PEMFC cathode plate has the capillary drainage structure, and a series of hydrophilic pores are produced on the cathode plate in array. The pores are etched holes penetrating the cathode plate. The pore array production is on the window ridge of the passive cathode plate window structure or the groove ridge of the active cathode plate. The capillary drainage structure is on the side of pores near the membrane electrode to produce the hydrophilic region. The plate making method is primarily based on the double-sided lithography, bulk silicon corrosion and silicon deep-hole etching process. Finally it uses the low-temperature oxygen plasma surface treatment process for surface hydrophilic treatment. The drainage structure of the invention has simpler production process and better compatibility with the traditional process, which is favorable for the integration of battery and other systems and for the high-volume production to reduce costs.

Description

technical field [0001] The invention belongs to the technical field of micro-energy and micro-machining, and in particular relates to a miniature PEMFC cathode plate with a capillary drainage structure and a manufacturing method thereof. Background technique [0002] Micro fuel cells can directly convert the chemical energy of fuel (such as methanol, hydrogen, etc.) into electrical energy. Compared with other micro-energy sources, it has the advantages of high energy density, room temperature operation, environmental protection, no moving parts, and easy fuel storage. Micro fuel cells are used in portable electronic devices (such as notebook computers, PDAs, digital cameras), wireless communication networks (such as mobile phones, GPS, sensor network nodes), microsystems (such as systems on chips, SOCs, microsystems composed of MEMS devices), etc. Has outstanding advantages. Micro-silicon-based fuel cells made using mature MEMS technology have the advantages of high precis...

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Problems solved by technology

Literature (Tobias Metza, Nils Paust, Claas M..uller, et al., "Passive water removal fuel cells by capillary droplet actuation", Sensors and Actuators: A, 143, 2008, pp.49-57.) introduced a A technology that uses the gradient change of hydrophilicity to drive water droplets to move so as to remove the accumulated water, but the method of making the changed hydrophilic gradient area is more complicated, the cost is high, and it is not compatible with the traditional process

At the same time, it cannot be well integrated with the original battery plate, resulting in an overly complex battery structure

And literature (Yun-Ju Chuang, Ching-Chang Chieng, Chin Pan, et al., "Aspontaneous and passive waste-management device (PWMD) for a micro directmethanol fuel cell", Journal of Micromechanics and Microengineering, 17, 2007, pp .915-922) designed a specific cathode channel structure, which can collect the generated water to the top of the channel to ensure the smooth flow of the cathode gas channel, but due to the particularity of the channel structure, its It cannot be realized by silicon processing; it is difficult to remove the accumulated water generated by the battery; at the same time, this structure cannot be used for passive battery cathodes

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