High-flux electrodeless vacuum ultraviolet light source

A vacuum ultraviolet light source and high-flux technology, applied in the field of electronics, to achieve the effects of stable physical and chemical properties, stable light quantum yield, and increased bearing capacity

Inactive Publication Date: 2009-10-28
RES CENT FOR ECO ENVIRONMENTAL SCI THE CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

At present, there is no complete vacuum ultraviolet l

Method used

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  • High-flux electrodeless vacuum ultraviolet light source
  • High-flux electrodeless vacuum ultraviolet light source

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Embodiment Construction

[0010] The main part of the high-flux electrodeless vacuum ultraviolet light source is composed of three parts: a gas distribution system (1), a radio frequency generating and matching device (2) and a vacuum ultraviolet lamp body (3). The specific implementation is: inject 10-300Pa medium gas into the gas buffer cavity (9) by the gas distribution system (1); start the radio frequency power generator (7), and the radio frequency wave is transmitted to the induction coil ( 9), the excitation induction coil generates a high-frequency electromagnetic field, and the inert gas in the inert gas excitation tube (10) is excited by electron collisions accelerated by a high-frequency electromagnetic field to generate atoms and excimers in a highly excited state, and the atoms and excimers in a highly excited state move to the ground state Vacuum ultraviolet light is emitted during the transition, which is macroscopically manifested as high-frequency electromagnetic field-induced plasma g...

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Abstract

The invention discloses a high-flux electrodeless vacuum ultraviolet light source, which consists of a radio frequency power supply, a radio frequency tuned matching device, a gas distribution system, a gas cushion chamber, an electromagnetic induction coil, an inert gas excitation tube and a magnesium fluoride lens window sheet. The excited gas is inert gas of helium, neon, argon, krypton gas, xenon and the like or certain proportion of mixed gas thereof. The interfaces of a magnesium fluoride lens, the inert gas excitation tube and the gas cushion chamber are sealed by using fluorinated O-ring, and the method is simple and convenient, and can be repeatedly demounted and randomly replace damaged parts of a lamp body. The light source mainly outputs 8 to 10.5 eV of continuous vacuum ultraviolet light.

Description

technical field [0001] The invention belongs to the field of electronic technology and can be used as an ionization light source for vacuum ultraviolet light ionization analysis and detection and related fields. Background technique [0002] The wavelength of vacuum ultraviolet light is in the spectral region of 1-200nm. It is a kind of high-energy photon radiation, which can cause material energy level transitions and chemical reactions that are difficult to achieve by other methods. In the field of instrumental analysis, due to the advantages of soft ionization of vacuum ultraviolet light, that is, few fragment ions generated by excitation, its application has been paid more and more attention. Vacuum ultraviolet light source generating devices are divided into two types: polar and non-polar. The former uses two metal electrodes to generate high-voltage DC discharge to excite the working gas to emit light. This type of light source has a complex structure, generally low p...

Claims

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Application Information

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IPC IPC(8): H01J65/04G01N27/64
Inventor 束继年孟筠旺高绍凯张阳李曜
Owner RES CENT FOR ECO ENVIRONMENTAL SCI THE CHINESE ACAD OF SCI
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