Polymer blue dye and application of polymer blue dye in acid copper plating process
An acid electroplating, blue dye technology, applied in the direction of organic dyes, etc., to achieve the effect of improving deep plating ability, strong filling and leveling, and shortening electroplating time
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[0015] In order to make the technical means and application methods of the present invention easier to understand, the present invention will be further described below in conjunction with specific embodiments.
[0016] Polymeric blue dye is the hydrogen sulfate salt of poly(2-methyl-3-amino-5-phenyi-7-(N, N-diethyiamino)phenazine) of formula (1), wherein n is 10
[0017]
[0018] The preparation method of polymerized blue dye is formed by polymerizing the basic violet 5 dye monomer (Basic Violet5) of formula (2), and the average degree of polymerization is 10
[0019]
[0020] The concentration of the polymerized blue dye in the electroplating solution is between 1.3 mg / L and the temperature is controlled between 10-30°C.
[0021] The polymeric blue dye of this embodiment is used as a leveling agent in the electroplating solution, which can greatly improve the efficiency of the copper electroplating process and shorten the electroplating time, which is 1 / 3-1 / 2 of the tr...
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