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Process used for spray forming Si-Al alloy solid-liquid two-phase region hot working molding encapsulating parts

A thermal forming and spray forming technology, applied in metal processing equipment, semiconductor/solid-state device manufacturing, electrical components, etc., can solve the problems of low material utilization rate, high production cost, long processing route, etc. Improve performance and overcome the effect of long processing routes

Active Publication Date: 2011-06-15
GRIMAT ENG INST CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] Aiming at the deficiencies in the background technology, the present invention provides a process for preparing silicon-aluminum-aluminum packaging parts by thermal processing in the solid-liquid two-phase region. In this process, the workpiece blank prepared by spray forming and the mold are placed in a hot-press furnace together. In the process, the silicon-aluminum alloy is quickly heated to the solid-liquid two-phase region and then hot-pressed, which overcomes the long processing route, low material utilization rate, and production cost that exist when the conventional process needs to be hot-pressed and densified before processing and forming packaged parts. A series of advanced problems, while effectively eliminating structural defects in the spray-formed ingot and improving the overall performance of the product, it has realized the short-process and near-final molding manufacturing of electronic packaging parts

Method used

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  • Process used for spray forming Si-Al alloy solid-liquid two-phase region hot working molding encapsulating parts
  • Process used for spray forming Si-Al alloy solid-liquid two-phase region hot working molding encapsulating parts

Examples

Experimental program
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Effect test

Embodiment 1

[0032] According to the mold size requirements, the 60wt% Si-Al alloy (the content of the alloy is: 60wt% Si and 40wt% Al) deposition blank prepared by spray forming is processed into the corresponding workpiece blank, 60wt% Si-Al alloy The photo of the microstructure of the deposited blank is shown in figure 1As shown in a, put the blank into the mold; place the assembled mold and workpiece together in a high-temperature hot-press furnace to heat up to 720°C, and apply a constant pressure to the mold during the heating process, and the pressure is 120MPa , heat preservation and pressure holding for 30 minutes, the mold with the workpiece is taken out of the furnace for air cooling, and after cooling, the workpiece is demoulded and the subsequent parts are finished into usable packaged parts. The microstructure of the 60wt% Si-Al alloy packaging part (made by the process of processing the solid-liquid two-phase region) of this embodiment is as follows figure 1 shown in d.

Embodiment 2

[0034] According to the mold size requirements, the prepared 60wt% Si-0.2wt% Mg-0.35wt% Mn-Al alloy (the content of this alloy is: 60wt% Si, 0.2wt% Mg, 0.35wt% Mn and 39.45wt% Al) deposition blanks are processed into corresponding workpiece blanks, and the blanks are packed into moulds; the assembled molds and workpieces are placed in a high-temperature hot-press furnace and heated to 695 ° C. During the process, a constant pressure is applied to the mold, the pressure is 150MPa, heat preservation and pressure holding for 25 minutes, the mold with the workpiece is taken out of the furnace for air cooling, and after cooling, the workpiece is demoulded and the subsequent parts are finished into usable packaged parts .

Embodiment 3

[0036] According to the mold size requirements, the 70wt% Si-0.45wt% Mg-0.15wt% Mn-0.22wt% Zr-Al prepared by spray forming (the content of the alloy is: 70wt% Si, 0.45wt% Mg, 0.15 Wt% Mn, 0.22wt% Zr and 29.18wt% Al) alloy deposition blanks are processed into corresponding workpiece blanks, and blanks are packed into moulds; the assembled molds and workpieces are placed in a high-temperature hot-press furnace Heating to 745°C, applying a constant pressure on the mold during the heating process, the pressure is 90MPa, heat preservation and pressure holding for 45min, take the mold with the workpiece out of the furnace for air cooling, and demould the workpiece after cooling And subsequent parts are finished into usable packaged parts.

[0037] figure 1 It is a microstructure comparison diagram of spray-formed 60wt% Si-Al alloy packaging parts obtained by different subsequent processing techniques. From figure 1 In a, it can be seen that the spray-formed silicon-aluminum alloy...

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Abstract

The invention provides a process for spray forming 50-80 wt% of Si-Al and the micro alloyed series alloy solid-liquid two-phase region hot working molding encapsulating parts, belonging to the field of metallic material processing and molding technique and electronic encapsulating material. The Si-Al alloy work piece blank which is well-prepared by spray forming and the mould are assembled well and placed in a hot pressing furnace for heating, and heat preservation forming is carried out when the solid-liquid two-phase region is heated. The process has the following parameters: the temperature is 680-760 DEG C, the intensity of pressure is 50-200 MPa and the time for heat preservation and pressure maintaining is 5-60min. The invention has the advantages that the two process procedures of densification treatment of spray forming ingot blank and the near net molding manufacturing of Si-Al alloy encapsulating parts are completed in one step of process operation, thus realizing the low cost, short flow and near net molding manufacturing of electronic encapsulating parts while effectively eliminating tissue defect in spray forming ingot blank and improving comprehensive performance of the product simultaneously.

Description

technical field [0001] The invention belongs to the field of metal material processing and molding and electronic packaging materials, and in particular provides a process specially used for thermal processing and molding of packaging parts in the solid-liquid two-phase region of silicon-aluminum alloy material with low density, low thermal expansion coefficient and high thermal conductivity. method. Background technique [0002] Electronic packaging technology is developed along with the development of microelectronics technology. The main function of electronic packaging is to provide mechanical support for fine electronic circuits and as a conductive connection medium, which plays an indispensable role in the development of microelectronics technology. The most basic part of an electronic package (level zero) is generally considered a semiconductor chip (integrated circuit), which integrates logic gates, transistors, and gate-to-gate connections, all directly integrated o...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C22F1/043H01L21/48B21J5/00
Inventor 李志辉张永安熊柏青朱宝宏刘红伟王锋李锡武
Owner GRIMAT ENG INST CO LTD
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