A kind of sintered NdFeB magnet with composite film layer and its preparation method

A composite film layer, NdFeB technology, applied in the coating, metal material coating process, vacuum evaporation plating, etc., can solve the problems of poor corrosion resistance, affecting the performance of sintered NdFeB magnets, etc., to improve the durability The effect of high temperature oxidation resistance and erosion resistance, reducing the internal stress of the film layer and enhancing the bonding force

Active Publication Date: 2020-11-10
NORTHEASTERN UNIV LIAONING
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  • Abstract
  • Description
  • Claims
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Problems solved by technology

[0005] Aiming at the existing technical problems, the present invention provides a sintered NdFeB magnet with a composite film layer and its preparation method, which solves the problem of poor corrosion resistance of sintered NdFeB magnets in the prior art, which affects the sintered NdFeB magnet. Problems with the performance of boron magnets

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  • A kind of sintered NdFeB magnet with composite film layer and its preparation method

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preparation example Construction

[0041] The embodiment of the present invention also provides a method for preparing a sintered NdFeB magnet with a composite film layer, which may include the following steps, see figure 1 .

[0042] s1: Grinding, polishing and cleaning the surface of the magnet body 1;

[0043] s2: An aluminum film layer 2, an aluminum oxide film layer 3 and a titanium nitride film layer 4 are sequentially deposited on the surface of the magnet body 1 by physical vapor deposition.

[0044] In step s1, grinding, polishing and cleaning the surface of the magnet body 1 can effectively remove impurities on the surface of the magnet, so that the deposited composite film can be more firmly combined with the magnet body 1 to prevent falling off and avoid The inclusion of impurities in the composite film will affect the corrosion resistance of the composite film.

[0045] In step s2, the physical vapor deposition method deposits a film layer, which has the characteristics of uniform and dense film ...

Embodiment 1

[0059] Fill the vacuum chamber with argon gas to a pressure of 0.5 Pa, energize the aluminum target, adjust the power of the aluminum target to 80W, and deposit an aluminum film layer 2 on the magnet body 1 after the pretreatment process and pre-coating treatment; The vacuum chamber is filled with argon gas to a pressure of 0.7Pa, and the radio frequency power is 250W, and the aluminum oxide film layer 3 is deposited on the aluminum film layer 2 of the magnet body 1 by radio frequency sputtering; finally, the gas in the vacuum chamber is exhausted, and the argon gas The flow rate is 30sccm and the nitrogen flow rate is 4sccm. Fill the vacuum chamber with argon and nitrogen until the vacuum chamber pressure is 0.7Pa, adjust the titanium target power to 100W, deposit a titanium nitride film layer 4 on the aluminum oxide film layer 3 of the magnet body 1, and complete Finally, turn off the power supply of the titanium target. After testing, the performance of the composite film ob...

Embodiment 2

[0061] Fill the vacuum chamber with argon gas to a pressure of 0.5Pa, energize the aluminum target, adjust the power of the aluminum target to 100W, and deposit an aluminum film layer 2 on the magnet body 1 after the pretreatment process and pre-coating treatment; The vacuum chamber is filled with argon gas to a pressure of 1.0Pa, and the radio frequency power is 350W. An aluminum oxide film layer 3 is deposited on the aluminum film layer 2 of the magnet body 1 by radio frequency sputtering; Fill the vacuum chamber with argon and nitrogen at 30sccm and nitrogen flow rate of 4sccm until the vacuum chamber pressure is 1.0Pa, adjust the titanium target power to 150W, and deposit a titanium nitride film 4 on the aluminum oxide film 3 of the magnet body 1. After completion Turn off the power supply of the titanium target. After testing, the performance of the composite film obtained under this condition is as follows: the total thickness of the film is 2.3 μm; the hardness of the fi...

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Abstract

The invention relates to the technical field of magnetic material surface protection, in particular to combined film layers on the surface of a sintered neodymium-iron-boron magnet and a preparation method of the sintered neodymium-iron-boron magnet. The sintered neodymium-iron-boron magnet with the combined film layers comprises a magnet body, the aluminum film layer, the aluminum oxide film layer and the titanium nitride film layer. The aluminum film layer, the aluminum oxide film layer and the titanium nitride film layer are arranged on the surface of the magnet body in a stacked mode in sequence. By the adoption of the sintered neodymium-iron-boron magnet, due to the sequential deposition of the aluminum film layer, the aluminum oxide film layer and the titanium nitride film layer, thestructural effect of the organizational defects which penetrate through films can be interrupted and closed, the organizational defects such as needle holes and microcracks which penetrate through the multiple films are avoided, and the corrosion resistance of the magnet is improved. The multiple films are alternately deposited, and therefore the internal stress of the film layers is reduced, titanium nitride can be compacter, the force of binding between the film layers and between the film layers and a substrate is also improved, and the corrosion resistance is further enhanced. In addition, due to the setting of the aluminum oxide film layer, the high temperature resistance and the oxidation resistance of the magnet are improved; and due to the deposition of the titanium nitride film layer, the erosion resistance capacity of the magnet is improved.

Description

technical field [0001] The invention relates to the technical field of magnetic material surface protection, in particular to a sintered NdFeB magnet with a composite film layer and a preparation method thereof. Background technique [0002] With the vigorous development of science and technology, sintered NdFeB magnets are widely used in high-tech industries such as new energy vehicle manufacturing, wind power generation, and new motors. [0003] At present, the surface treatment of sintered NdFeB magnets is mostly carried out by physical phase deposition of titanium nitride thin films in the industry, and single titanium nitride thin films generally have structural defects such as pinholes and microcracks. The corrosive medium will invade the sintered NdFeB magnet through the path formed by the above-mentioned structural defects, resulting in poor corrosion resistance of the sintered NdFeB magnet, thus affecting the performance of the sintered NdFeB magnet. Contents of t...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/16C23C14/08C23C14/06C23C14/02C23C14/35
CPCC23C14/0036C23C14/021C23C14/0641C23C14/081C23C14/165C23C14/35
Inventor 谢元华王朋阳刘坤杜广煜臧浩天胡强张昕洁
Owner NORTHEASTERN UNIV LIAONING
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