T-shaped sensitive body of vector hydrophone

A vector hydrophone and sensitive body technology, applied in instruments, measuring devices, measuring ultrasonic/sonic/infrasonic waves, etc., can solve the problems of vector detection and high sensitivity of the vector hydroacoustic sensor, and achieve the best power consumption. Low cost, low processing cost and stable performance

Inactive Publication Date: 2010-06-16
ZHONGBEI UNIV
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AI Technical Summary

Problems solved by technology

[0004] The present invention provides a T-shaped sensitive body of a vector hydrophone to solve the problem that the existing vector ...

Method used

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  • T-shaped sensitive body of vector hydrophone
  • T-shaped sensitive body of vector hydrophone
  • T-shaped sensitive body of vector hydrophone

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Embodiment Construction

[0032] Such as Figure 1-3 As shown, the T-shaped sensitive body of the vector hydrophone includes a T-shaped body processed by silicon-based MEMS processing technology with silicon wafers as the processing material. Composed of rectangular parallelepiped columns 2, three reference resistors R2, R3, R4 with equal resistance are processed on the rectangular parallelepiped base 1 by diffusion process, strained piezoresistor R1 is processed on the rectangular parallelepiped column 2 by diffusion process, and the strained piezoresistor R1 Located at the root of the cuboid column 2 (that is, the end of the cuboid column close to the cuboid base), the resistance of the strain varistor R1 is equal to the resistance of the reference resistor, and the strain varistor R1 is connected to the reference resistors R2, R3, and R4 to form a In the Wheatstone bridge, the three reference resistors R2, R3, and R4 are respectively used as the unilateral reference bridge arm of the Wheatstone brid...

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Abstract

The invention relates to a vector hydrophone in the field of MEMS sensors, in particular to a T-shaped sensitive body of the vector hydrophone. The invention solves the problems that the conventional vector hydrophone cannot exert optimal advantages in vector detection and high sensitivity caused by a machining process; the T-shaped sensitive body comprises a T-shaped body consisting of a rectangular pedestal and a rectangular upright post; the rectangular pedestal is provided with three reference resisters with the same resistance value through a diffusion process; the rectangular upright post is provided with a strain piezoresistor positioned on the root of the rectangular upright post; the resistance value of the strain piezoresistor R1 is the same as that of the reference resistors; and the strain piezoresistor R1 and the reference resistors R2, R3 and R4 are connected into a Wheatstone bridge. The T-shaped sensitive body has the advantages of simple and novel structure, high sensitivity, small size, low power consumption, far detection distance, good eight-figure directivity and low machining cost, and is suitable for batch production; and the vector hydrophone produced and machined by the T-shaped sensitive body has wide application range.

Description

technical field [0001] The invention relates to a vector hydrophone in the field of MEMS sensors, in particular to a T-shaped sensitive body of the vector hydrophone. Background technique [0002] The Chinese patent No. ZL200610012991.0 discloses a "resonance tunneling bionic vector underwater acoustic sensor". The resonant tunneling diodes around the column replace the sensory cells around the cilia, imitating the principle of fish lateral line hearing, and by measuring the state of the micro column, the detection of the orientation and sound pressure of the underwater acoustic signal is realized. [0003] After testing, the vector underwater acoustic sensor with this structure has the advantages of vector detection and high sensitivity. However, according to the processing capacity of the current MEMS processing technology at home and abroad, when the vector underwater acoustic sensor of this structure is realized, the cross-shaped cantilever beam and the micro-column bod...

Claims

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Application Information

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IPC IPC(8): G01H11/06
Inventor 张文栋李汉清张国军王洪亮何常德关凌纲许姣王晓瑶王鹏
Owner ZHONGBEI UNIV
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