Numerical control scanning waveform generator

A technology of scanning waveforms and generators, which is applied in semiconductor/solid-state device manufacturing, discharge tubes, electrical components, etc., can solve problems such as complex injection processes, achieve isolation potential interference, save control costs, and meet horizontal scanning accuracy requirements Effect

Inactive Publication Date: 2010-06-30
BEIJING ZHONGKEXIN ELECTRONICS EQUIP
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With the continuous improvement of IC integration, the...
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Abstract

The invention discloses a numerical control scanning waveform generator, which comprises a DAC1 (digital-to-analog converter), a DAC2, a system controller, a comparator, an integrator, an amplifier, a resistor, a capacitor, a scanning speed controller, a position pulse and a scanning waveform. Compared with the conventional scanning waveform generator of an ion implanter, the invention is characterized in that the scanning cycle is a fixed constant, but within a scanning cycle, the real scanning time can be precisely adjusted by software, that is, the scanning duty ratio can be precisely adjusted. Moreover, in a beam adjusting period which has no need of scanning beam, the beam deflecting function can act on, and a beam deflection controller is saved.

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  • Numerical control scanning waveform generator
  • Numerical control scanning waveform generator

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[0027] The following further introduces the present invention in combination with the drawings and specific embodiments, but it is not intended to limit the new type of the present invention.
[0028] As shown in Fig. 1, the general principle diagram of the CNC scanning waveform generator to realize the scanning waveform output, the system controller 3 controls the ion beam scanning, and the scanning waveform can be a piecewise linear curve defined by the slope and the position end point. The data defining the waveform is stored in the waveform memory in the system controller 3. The system controller 3 loads the slope and position end signal data into two D/A converters, DAC1 and DAC2, respectively. The output of DAC1 drives the integrator 5. The output of the integrator 5 and the output of DAC2 are supplied to the input of the comparator 4. When the integrator 5 reaches the specified end of the position, the comparator 4 provides the signal to the system controller 3. Then, the position pulse 10 triggers the system controller 3 to output the new slope and end position data for the next waveform. The output of the integrator 5 is passed through the amplifier 6 to form a scanning waveform 11. During the scanning process, the scanning speed control 9 is controlled by the program, and the duty ratio of the scanning waveform is precisely controlled under a fixed scanning period to achieve the correction output of the scanning waveform 11.
[0029] The specific embodiments of the patent for the present invention have explained the content of the present invention in detail. For those of ordinary skill in the art, any obvious changes made to the invention patent without departing from the spirit of the invention patent constitute an infringement of the invention patent and will bear corresponding legal liabilities.
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