Numerical control scanning waveform generator

[0027] The following further introduces the present invention in combination with the drawings and specific embodiments, but it is not intended to limit the new type of the present invention.

[0028] As shown in Fig. 1, the general principle diagram of the CNC scanning waveform generator to realize the scanning waveform output, the system controller 3 controls the ion beam scanning, and the scanning waveform can be a piecewise linear curve defined by the slope and the position end point. The data defining the waveform is stored in the waveform memory in the system controller 3. The system controller 3 loads the slope and position end signal data into two D/A converters, DAC1 and DAC2, respectively. The output of DAC1 drives the integrator 5. The output of the integrator 5 and the output of DAC2 are supplied to the input of the comparator 4. When the integrator 5 reaches the specified end of the position, the comparator 4 provides the signal to the system controller 3. Then, the position pulse 10 triggers the system controller 3 to output the new slope and end position data for the next waveform. The output of the integrator 5 is passed through the amplifier 6 to form a scanning waveform 11. During the scanning process, the scanning speed control 9 is controlled by the program, and the duty ratio of the scanning waveform is precisely controlled under a fixed scanning period to achieve the correction output of the scanning waveform 11.

[0029] The specific embodiments of the patent for the present invention have explained the content of the present invention in detail. For those of ordinary skill in the art, any obvious changes made to the invention patent without departing from the spirit of the invention patent constitute an infringement of the invention patent and will bear corresponding legal liabilities.