Numerical control scanning waveform generator
A technology of scanning waveforms and generators, which is applied in semiconductor/solid-state device manufacturing, discharge tubes, electrical components, etc., can solve problems such as complex injection processes, achieve isolation potential interference, save control costs, and meet horizontal scanning accuracy requirements Effect
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[0027] The following further introduces the present invention in combination with the drawings and specific embodiments, but it is not intended to limit the new type of the present invention.
[0028] As shown in Fig. 1, the general principle diagram of the CNC scanning waveform generator to realize the scanning waveform output, the system controller 3 controls the ion beam scanning, and the scanning waveform can be a piecewise linear curve defined by the slope and the position end point. The data defining the waveform is stored in the waveform memory in the system controller 3. The system controller 3 loads the slope and position end signal data into two D / A converters, DAC1 and DAC2, respectively. The output of DAC1 drives the integrator 5. The output of the integrator 5 and the output of DAC2 are supplied to the input of the comparator 4. When the integrator 5 reaches the specified end of the position, the comparator 4 provides the signal to the system controller 3. Then, the ...
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