Double-optical wedge splicing pyramid wavefront sensor
A wavefront sensor, quadrangular pyramid technology, applied in the direction of instruments, scientific instruments, measuring optics, etc., to achieve the effects of easy processing, good practicability, and strong operability
Inactive Publication Date: 2012-01-25
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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Although the LIGA method can be used to mass-produce square pyramids with consistent optical properties, the platform width of the finished square pyramids currently provided is also 20-30um (Microelectronic Engineering 67-68, 566-573, 2003)
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[0017] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.
[0018] Such as figure 1 The schematic diagram of the quadrangular pyramidal wavefront sensor spliced by double optical wedges is shown, Figure 1a is the schematic diagram of the structure of the first two-sided axicon prism, Figure 1b It is the second two-sided axicon structure schematic diagram, and the present invention is composed of the first two-sided axicon prism 1, the second two-sided axicon prism 2, two adjustable rotations and two-dimensionally tilted mirror holders (not shown in the figure), two Two-dimensional translation stage (not shown in the figure), the first lens L 1 and the second lens L 2 Composition, first lens L 1 , the combined first two-sided axicon prism 1 and the second two-sided axicon p...
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The invention relates to a double-optical wedge splicing pyramid wavefront sensor comprising two double-side conical prisms, a mirror bracket, two two-dimensional translation platforms, a first lens and a second lens, wherein the ridge edges of the double-side conical prisms are vertically placed and spliced. The two double-side conical prisms are regulated so that the joint of the double-side conical prisms is coincident with the back focus of the first lens, incident distorted wavefronts are focused on the double-side conical prisms by the first lens and then are divided into four light beams by the double-side conical prisms, the first lens behind the first lens images the light beams to a CCD (Charge Coupled Device) image detector, measurement signals are acquired by analyzing the light intensity differences among four light pupils, and then the phase distribution of the incident wavefronts can be obtained by wavefront restoring calculation. The wavefront sensor can realize all functions of a pyramid wavefront sensor, the device processing difficulty of the wavefront sensor is greatly lower than the processing difficulty of a four-pyramid device, and the wavefront sensor is easy to operate and meets the requirements on the optical system of the pyramid wavefront sensor.
Description
technical field [0001] The invention belongs to key devices in the technical fields of adaptive optics, wave front detection, etc., and relates to a manufacturing method of a key device of a quadrangular pyramid wave front sensor. Background technique [0002] The wavefront sensor is an important device for measuring wavefront distortion in an adaptive system. According to the connection between the measurement signal and the wavefront, it can be divided into two categories: one is to obtain the wavefront by measuring the slope of the wavefront (ie, the first derivative of the wavefront) Phase, the more typical Hartmann wavefront sensor, shearing interferometer, etc.; the other is to measure the wavefront curvature (ie, the second derivative of the wavefront) to obtain the wavefront phase, mainly curvature wavefront sensor. [0003] The most commonly used Hartmann wavefront sensor uses a microlens array to segment the entrance pupil, and calculates the wavefront slope by mea...
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IPC IPC(8): G01J9/00
Inventor 王建新姜文汉
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI