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Champagne gold target for vacuum magnetron sputtering and preparation method thereof

A vacuum magnetron sputtering, champagne color technology, applied in the metallurgical field, can solve the problems of high cost, wear resistance, environmental pollution, etc., and achieve the effect of bright and soft color, good wear resistance and good effect

Active Publication Date: 2012-02-22
沈阳东创贵金属材料有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Due to the unique color, the previous production process used the water electroplating process to color the color, which not only pollutes the environment, but also has high cost and is not wear-resistant.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0009] The composition of the champagne-colored gold target for vacuum magnetron sputtering is: Yttrium (Y) 0.7%, Iron (Fe) 2.1%, Chromium (Cr) 1.5%, Indium (In) 1.3%, Aluminum ( Al) 0.6%, the rest is gold (Au).

[0010] The preparation method of the champagne color gold target material for vacuum magnetron sputtering is as follows.

[0011] The ratio of raw materials is: 0.7% yttrium (Y), 2.1% iron (Fe), 1.5% chromium (Cr), 1.3% indium (In), 0.6% aluminum (Al), and the rest is gold (Au). Using a high-frequency induction furnace for smelting, first put iron and chromium metal into the bottom of the clay crucible, then add gold material into the crucible, start smelting, and stir evenly after the alloy is melted. Then add low melting point metal indium, aluminum and rare earth yttrium in sequence, control the furnace temperature to 1200°C, and refine at this temperature for 4 minutes. After refining, all the molten alloy is poured into a cast iron mold preheated to 350°C. Af...

Embodiment 2

[0013] The composition of the champagne-colored gold target for vacuum magnetron sputtering is: yttrium (Y) 1.3%, iron (Fe) 3%, chromium (Cr) 0.5%, indium (In) 0.5%, aluminum ( Al) 0.2%, the rest is gold (Au).

[0014] The preparation method of the champagne color gold target material for vacuum magnetron sputtering is as follows.

[0015] The ratio of raw materials is as follows: 1.3% yttrium (Y), 3% iron (Fe), 0.5% chromium (Cr), 0.5% indium (In), 0.2% aluminum (Al), and the rest is gold (Au). Using a high-frequency induction furnace for smelting, first put iron and chromium metal into the bottom of the clay crucible, then add gold material into the crucible, start smelting, and stir evenly after the alloy is melted. Then add low-melting point metal indium, aluminum and rare earth yttrium in sequence, control the furnace temperature to 1250°C, and refine at this temperature for 3 minutes. After refining, all the molten alloy is poured into a cast iron mold preheated to 400...

Embodiment 3

[0017] The composition of the champagne-colored gold target for vacuum magnetron sputtering is: Yttrium (Y) 0.1%, Iron (Fe) 1.2%, Chromium (Cr) 2.5%, Indium (In) 2%, Aluminum ( Al) 1%, the rest is gold (Au).

[0018] The preparation method of the champagne color gold target material for vacuum magnetron sputtering is as follows.

[0019] The proportion of raw materials is as follows: 0.1% yttrium (Y), 1.2% iron (Fe), 2.5% chromium (Cr), 2% indium (In), 1% aluminum (Al), and the rest is gold (Au). Using a high-frequency induction furnace for smelting, first put iron and chromium metal into the bottom of the clay crucible, then add gold material into the crucible, start smelting, and stir evenly after the alloy is melted. Then add low melting point metal indium, aluminum and rare earth yttrium in sequence, control the furnace temperature to 1150°C, and refine at this temperature for 5 minutes. After refining, all the molten alloy is poured into a cast iron mold preheated to 30...

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Abstract

The invention discloses a champagne gold target for vacuum magnetron sputtering and a preparation method thereof. The gold target comprises the following components in percentage by mass: 0.1 to 1.3 percent of Y, 1.2 to 3 percent of Fe, 0.5 to 2.5 percent of Cr, 0.5 to 2 percent of In, 0.2 to 1 percent of Al and the balance of Au. A high-frequency induction furnace is adopted for smelting. The preparation method comprises the following steps of: putting iron and chromium to the bottom of a crucible, adding a gold material into the crucible, beginning smelting, stirring the alloy uniformly after the alloy is melted, then adding indium, aluminum and yttrium into the alloy in turn, controlling the furnace temperature to be between 1,150 and 1,250 DEG C, refining the alloy for 3 to 5 minutes, pouring the alloy into a pre-heated cast iron mold, taking out the alloy after condensation, naturally cooling the alloy to room temperature, and performing surface milling, cold rolling, straightening and shearing operations to obtain the champagne gold target. Various technical indexes of the gold target meet the international standards, and the gold target for a vacuum magnetron sputtering process can avoid environmental pollution caused by a water electroplating process and ensure the chromatic stability of a film layer.

Description

technical field [0001] The invention belongs to the technical field of metallurgy and relates to the processing technology of precious metal alloys, in particular to a champagne-coloured gold target and a preparation method thereof. Background technique [0002] The chromaticity of champagne gold is equivalent to 0.5N of the standard chromaticity ISO 8654:1987. Its light and elegant color is very popular in European and American markets. Due to the unique color, the previous production process used the water electroplating process to color the color, which not only pollutes the environment, but also has high cost and is not wear-resistant. Champagne-colored gold coating is applied by magnetron sputtering in a vacuum furnace, and rare earth elements and other base metals are added to the gold to make it bright and elegant in color, with balanced chroma, good oxidation resistance, and significantly improved hardness and wear resistance. Contents of the invention [0003] A...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/35C22C1/02
Inventor 刘革
Owner 沈阳东创贵金属材料有限公司
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