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Polyimide film miniature quick-response humidity sensing element and manufacturing method thereof

A polyimide film, fast response technology, applied in microstructure technology, microstructure devices, manufacturing microstructure devices, etc., can solve the problems of no product, little research on the dynamic response performance of humidity sensors, etc., to achieve fast response speed Effect

Active Publication Date: 2011-01-19
LANZHOU JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Most of the humidity sensors reported in foreign literature use gold as the electrode material, and there are not many studies on the dynamic response performance of humidity sensors. The fastest response time of humidity sensors is about 500ms (BCB), but there are no products, and the slowest is about tens of seconds.

Method used

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  • Polyimide film miniature quick-response humidity sensing element and manufacturing method thereof
  • Polyimide film miniature quick-response humidity sensing element and manufacturing method thereof
  • Polyimide film miniature quick-response humidity sensing element and manufacturing method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0055]Using microelectronics technology: electrode width / spacing 1μm.

[0056] 1) Clean and oxidize the electrodes.

[0057] 2) Sputtering lower electrode: Mo-Al is sputtered sequentially on a large area, in which Mo is used as a buffer layer with a thickness of 500 In order to enhance the adhesion between the Al electrode and the oxide layer, the total thickness of the electrode is 9000

[0058] 3) Coating polyimide:

[0059] a. Synthesis of polyimide acid: control temperature at 20°C, use N,N-dimethylacetamide as solvent, 4,4-diamino-p-phenylene ether and pyromellitic dianhydride as monomers, two The mass of the first monomer is 2.0g and 1.6g respectively, and the concentration of the polyimide acid solution is controlled at 5%, reacted for 5 hours under nitrogen protection, then added 0.18g of 3,5-diaminobenzoic acid, and reacted for another 2 hours. A polyimide acid solution is obtained.

[0060] B, the method for coating polyimide is: the concentration of polyimide...

Embodiment 2

[0072] Using microelectronic technology: electrode width / spacing 12μm.

[0073] 1) Clean and oxidize the electrodes.

[0074] 2) Sputtering lower electrode: Mo-Pt is sequentially sputtered on a large area, in which Mo is used as a buffer layer with a thickness of 1500 In order to enhance the adhesion between the Al electrode and the oxide layer, the total thickness of the electrode is 15000

[0075] 3) Coating polyimide:

[0076] a. Synthesis of polyimide acid: control temperature at 50°C, use N,N-dimethylacetamide as solvent, 4,4-diamino-p-phenylene ether and pyromellitic dianhydride as monomers, two The quality of a kind of monomer is 2.0g and 2.6g respectively, and the concentration of the polyimide acid solution is controlled at 20%, and reacted for 10 hours under nitrogen protection, and then adds 3,5-diaminobenzoic acid accounting for 0.23g of the total reactant amount, Reaction was continued for 4 hours to obtain a polyimide acid solution.

[0077] b, the method ...

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Abstract

The invention relates to a polyimide film miniature quick-response humidity sensing element, which is in a high polymer parallel-plate capacitance structure, an upper metal layer is an upper electrode, a lower metal layer is a lower electrode, and a humidity-sensitive layer is arranged between the upper metal layer and the lower metal layer. The polyimide film miniature quick-response humidity sensing element is characterized in that the upper electrode is in grid arrangement, and the humidity-sensitive layer takes polyimide as a humidity-sensitive film. In a manufacturing method, the polyimide film miniature quick-response humidity sensing element is manufactured by adopting a micro-electronics process through processes such as the cleaning and oxidizing of pole pieces, the evaporation of the lower electrode, polyimide coating, imidization, the sputtering of the upper electrode, primary photoetching, secondary photoetching, third-time photoetching, sectioning, bonding, capsulation and the like. In the polyimide film miniature quick-response humidity sensing element, novel polyimide is selected as a humidity-sensitive material, the response speed of moisture absorption and dehumidification is quick; the structure of the upper and the lower electrodes is favorable for detecting the subtle change of water concentration in the humidity-sensitive film; in addition, the controlled range of the film thickness contributes to quick response, and the index of the response speed reaches 500 ms.

Description

technical field [0001] The invention relates to the application research of the humidity sensing element, in particular to a polyimide membrane miniature fast-response humidity sensing element used in a fuel cell vehicle, and the invention also includes a manufacturing method of the element. Background technique [0002] The measurement of gas humidity in a fuel cell vehicle engine is very important and has high requirements. The existing humidity sensor transmission principle is based on the hydrophilic mechanism of substances, which cannot meet the requirements of fast response, and the response time is generally long. At the same time, related fields at home and abroad are demanding There are few studies on the dynamic response time of humidity sensors, and there are few reference materials for fast-response humidity sensors. Humidity sensors reported in domestic literature mostly use gold or aluminum as electrode materials, and there are few studies on the dynamic respon...

Claims

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Application Information

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IPC IPC(8): G01N27/22B81C1/00
Inventor 王良璧周文和王良成杨建红常青令小波胡万林任学昌
Owner LANZHOU JIAOTONG UNIV
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