Polyimide film miniature quick-response humidity sensing element and manufacturing method thereof
What is Al technical title?
Al technical title is built by PatSnap Al team. It summarizes the technical point description of the patent document.
A polyimide film, fast response technology, applied in microstructure technology, microstructure devices, manufacturing microstructure devices, etc., can solve the problems of no product, little research on the dynamic response performance of humidity sensors, etc., to achieve fast response speed Effect
Active Publication Date: 2011-01-19
LANZHOU JIAOTONG UNIV
View PDF2 Cites 12 Cited by
Summary
Abstract
Description
Claims
Application Information
AI Technical Summary
This helps you quickly interpret patents by identifying the three key elements:
Problems solved by technology
Method used
Benefits of technology
Problems solved by technology
Most of the humidity sensors reported in foreign literature use gold as the electrode material, and there are not many studies on the dynamic response perfor...
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more
Image
Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
Click on the blue label to locate the original text in one second.
Reading with bidirectional positioning of images and text.
[0057] 2) Sputtering lower electrode: Mo-Al is sputtered sequentially on a large area, in which Mo is used as a buffer layer with a thickness of 500 In order to enhance the adhesion between the Al electrode and the oxide layer, the total thickness of the electrode is 9000
[0058] 3) Coating polyimide:
[0059] a. Synthesis of polyimide acid: control temperature at 20°C, use N,N-dimethylacetamide as solvent, 4,4-diamino-p-phenylene ether and pyromellitic dianhydride as monomers, two The mass of the first monomer is 2.0g and 1.6g respectively, and the concentration of the polyimide acid solution is controlled at 5%, reacted for 5 hours under nitrogen protection, then added 0.18g of 3,5-diaminobenzoic acid, and reacted for another 2 hours. A polyimide acid solution is obtained.
[0060] B, the method for coating polyimide is: the concentration of polyimide...
Embodiment 2
[0072] Using microelectronic technology: electrode width / spacing 12μm.
[0073] 1) Clean and oxidize the electrodes.
[0074] 2) Sputtering lower electrode: Mo-Pt is sequentially sputtered on a large area, in which Mo is used as a buffer layer with a thickness of 1500 In order to enhance the adhesion between the Al electrode and the oxide layer, the total thickness of the electrode is 15000
[0075] 3) Coating polyimide:
[0076] a. Synthesis of polyimide acid: control temperature at 50°C, use N,N-dimethylacetamide as solvent, 4,4-diamino-p-phenylene ether and pyromellitic dianhydride as monomers, two The quality of a kind of monomer is 2.0g and 2.6g respectively, and the concentration of the polyimide acid solution is controlled at 20%, and reacted for 10 hours under nitrogen protection, and then adds 3,5-diaminobenzoic acid accounting for 0.23g of the total reactant amount, Reaction was continued for 4 hours to obtain a polyimide acid solution.
[0077] b, the method ...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more
PUM
Property
Measurement
Unit
Line width
aaaaa
aaaaa
Login to view more
Abstract
The invention relates to a polyimide film miniature quick-response humidity sensing element, which is in a high polymer parallel-plate capacitance structure, an upper metal layer is an upper electrode, a lower metal layer is a lower electrode, and a humidity-sensitive layer is arranged between the upper metal layer and the lower metal layer. The polyimide film miniature quick-response humidity sensing element is characterized in that the upper electrode is in grid arrangement, and the humidity-sensitive layer takes polyimide as a humidity-sensitive film. In a manufacturing method, the polyimide film miniature quick-response humidity sensing element is manufactured by adopting a micro-electronics process through processes such as the cleaning and oxidizing of pole pieces, the evaporation of the lower electrode, polyimide coating, imidization, the sputtering of the upper electrode, primary photoetching, secondary photoetching, third-time photoetching, sectioning, bonding, capsulation and the like. In the polyimide film miniature quick-response humidity sensing element, novel polyimide is selected as a humidity-sensitive material, the response speed of moisture absorption and dehumidification is quick; the structure of the upper and the lower electrodes is favorable for detecting the subtle change of water concentration in the humidity-sensitive film; in addition, the controlled range of the film thickness contributes to quick response, and the index of the response speed reaches 500 ms.
Description
technical field [0001] The invention relates to the application research of the humidity sensing element, in particular to a polyimide membrane miniature fast-response humidity sensing element used in a fuel cell vehicle, and the invention also includes a manufacturing method of the element. Background technique [0002] The measurement of gas humidity in a fuel cell vehicle engine is very important and has high requirements. The existing humidity sensor transmission principle is based on the hydrophilic mechanism of substances, which cannot meet the requirements of fast response, and the response time is generally long. At the same time, related fields at home and abroad are demanding There are few studies on the dynamic response time of humidity sensors, and there are few reference materials for fast-response humidity sensors. Humidity sensors reported in domestic literature mostly use gold or aluminum as electrode materials, and there are few studies on the dynamic respon...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more
Application Information
Patent Timeline
Application Date:The date an application was filed.
Publication Date:The date a patent or application was officially published.
First Publication Date:The earliest publication date of a patent with the same application number.
Issue Date:Publication date of the patent grant document.
PCT Entry Date:The Entry date of PCT National Phase.
Estimated Expiry Date:The statutory expiry date of a patent right according to the Patent Law, and it is the longest term of protection that the patent right can achieve without the termination of the patent right due to other reasons(Term extension factor has been taken into account ).
Invalid Date:Actual expiry date is based on effective date or publication date of legal transaction data of invalid patent.
Login to view more