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Siliceous copolymer resistor type thin film humidity sensitive element and method for making same

A technology of humidity sensitive element and manufacturing method, which is applied in the direction of electrical components, electric solid devices, circuits, etc., and can solve the problem of poor adhesion between the moisture sensitive film and the electrode base material, unsatisfactory long-term stability and reliability, dehumidification, etc. Response speed is not fast enough to achieve fast moisture absorption and dehumidification response speed, improved sensitivity, and low cost

Inactive Publication Date: 2008-04-30
上海华实纳米材料有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, it also has problems such as slow dehumidification response speed, difficulty in measuring low humidity environment, high humidity resistance, low response sensitivity in high humidity environment, unsatisfactory long-term stability and reliability, etc., which hinder and restrict its practical application and further development.
This is mainly because the polyelectrolyte is easy to absorb water molecules, but it is not easy to detach water molecules. At the same time, the adhesion between the moisture-sensitive film and the electrode substrate material is not good, and it is easy to swell and fall off in a high-humidity environment.

Method used

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  • Siliceous copolymer resistor type thin film humidity sensitive element and method for making same
  • Siliceous copolymer resistor type thin film humidity sensitive element and method for making same
  • Siliceous copolymer resistor type thin film humidity sensitive element and method for making same

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0023] 1. Electrode cleaning

[0024] Soak and clean the glass-ceramic interdigitated gold electrodes in absolute ethanol and acetone, and dry them for later use

[0025] 2. Preparation of moisture-sensitive film by dip coating and post-treatment

[0026] Use a dip coater to immerse the glass-ceramic interdigitated gold electrode into a moisture-sensitive solution (20 parts by weight of silicon-containing copolymer-quaternary ammonium salt and siloxane in a molar ratio of 4:1, 100 parts by weight of deionized water), After 4 minutes, pull at a speed of 8 mm / s, take it out and place it in a constant temperature oven, and heat-treat it at 80°C for 15 hours to obtain a moisture-sensitive film;

[0027] 3. Aging treatment

[0028] Put the humidity sensitive element with moisture-sensitive film on the interdigitated gold electrode of glass-ceramics in a constant temperature and humidity box, and apply an AC voltage of 800mv and 1kHz under the environment of 40°C and 60%RH, and ag...

Embodiment 2

[0030] 1. Electrode cleaning is the same as in Example 1

[0031] 2. Preparation of moisture-sensitive film by dip coating and post-treatment

[0032] Use a dipping machine to immerse the glass-ceramic interdigitated gold electrode into a moisture-sensitive solution (40 parts by weight of silicon-containing copolymer-quaternary ammonium salt and siloxane in a molar ratio of 2:1, 100 parts by weight of deionized water), After 2 minutes, pull at a speed of 6mm / s, take it out and place it in a constant temperature oven, and heat-treat it at 110°C for 8 hours to obtain a moisture-sensitive film;

[0033] 3. Aging treatment

[0034] The moisture sensitive element with moisture-sensitive film on the interdigitated gold electrode of glass-ceramics is aged at 30°C and 90% RH with an AC voltage of 300mv and 1kHz for 30 hours.

[0035] Its moisture-sensitive response characteristics such as figure 2 , hysteresis characteristics such as image 3 , response time characteristics such ...

Embodiment 3

[0037] 1. Electrode cleaning is the same as in Example 1

[0038] 2. Preparation of moisture-sensitive film by dip coating and post-treatment

[0039] Use a dipping machine to immerse the glass-ceramic interdigitated gold electrode into a moisture-sensitive solution (60 parts by weight of silicon-containing copolymer-quaternary ammonium salt and siloxane in a molar ratio of 6:1, 100 parts by weight of deionized water), After 1 minute, pull at a speed of 2 mm / s, take it out and place it in a constant temperature oven, and heat-treat it at 120°C for 5 hours to obtain a moisture-sensitive film;

[0040] 3. Aging treatment

[0041] The moisture sensitive element with moisture-sensitive film on the interdigitated gold electrode of glass-ceramic is aged at 30°C and 80% RH with an AC voltage of 100mv and 1kHz for 50 hours.

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Abstract

This invention discloses a siliceous copolymer resistance thin film dew sensor and its process method, wherein the sensor comprises the following parts: micro crystal glass base with multiple pairs of crossed gold electrode connected with wires on the surface; dew sensitive film coated on the surface of the micro crystal glass and the crossed gold electrode, wherein the film is the siliceous positive ion electrolyte copolymer. The method comprises the following steps: a, dipping the micro crystal glass and the crossed gold electrode into the dew sensitive liquid by dipping machine; pulling and taking out the electrode for thermal process to make the dew sensitive film; b, electrifying the micro crystal glass with dew sensitive film and the electrode under certain temperature and the humidity to get the dew sensor.

Description

technical field [0001] The invention relates to a silicon-containing copolymer resistive thin film humidity sensitive element and a manufacturing method thereof. Background technique [0002] The progress of society and the development of technology have opened up a vast sensor space for us. Humidity sensors are an important type of chemical sensors, which are widely used in storage, industrial production, process control, environmental monitoring, household appliances, meteorology, etc. And it plays an increasingly important role in the development of modern science and technology and people's lives. Polymer humidity sensor is a new type of humidity sensor widely used at present, mainly including capacitive type and resistive type. Among them, the polymer resistive humidity sensor has become the trend of research and development because of its good response characteristics, wide range of humidity measurement, simple manufacture, easy integration, miniaturized mass producti...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L49/00G01N27/12G01N25/56H10N99/00
Inventor 杨慕杰姚宗武李扬黄德欢
Owner 上海华实纳米材料有限公司
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