The invention relates to a
polyimide film miniature quick-response
humidity sensing element, which is in a
high polymer parallel-plate
capacitance structure, an upper
metal layer is an upper
electrode, a lower
metal layer is a lower
electrode, and a
humidity-sensitive layer is arranged between the upper
metal layer and the lower metal layer. The
polyimide film miniature quick-response
humidity sensing element is characterized in that the upper
electrode is in grid arrangement, and the humidity-sensitive layer takes
polyimide as a humidity-sensitive film. In a manufacturing method, the polyimide film miniature quick-response humidity sensing element is manufactured by adopting a micro-
electronics process through processes such as the cleaning and oxidizing of pole pieces, the
evaporation of the lower electrode, polyimide
coating, imidization, the
sputtering of the upper electrode, primary photoetching, secondary photoetching, third-time photoetching, sectioning, bonding, capsulation and the like. In the polyimide film miniature quick-response humidity sensing element, novel polyimide is selected as a humidity-sensitive material, the response speed of
moisture absorption and dehumidification is quick; the structure of the upper and the lower electrodes is favorable for detecting the subtle change of
water concentration in the humidity-sensitive film; in addition, the controlled range of the film thickness contributes to quick response, and the index of the response speed reaches 500 ms.