Integrated probe type microsphere cavity sensor

Abstract

The invention provides an integrated probe type microsphere cavity sensor, comprising an integrated input optical fiber, a microsphere cavity and an integrated output optical fiber. The sensor is characterized in that the sphere shaped microsphere cavity is integrated with the integrated input optical fiber and the integrated output optical fiber into a whole; the microsphere cavity is used as an optical transmission vector and an external parameter probe; the integrated input optical fiber is used as an optical signal input end; the integrated output optical fiber is used as an optical signal output end; and the microsphere cavity sensor is a sensor integrating laser input, optical coupling, optical transmission and optical detection. The integrated probe type microsphere cavity sensor overcomes the defect that the traditional micro-cavity performs optical mode excitation and structure separation depending on a conical optical fiber, has the advantages of simple structure, optical integrated coupling, high reliability, small volume, light weight, abrasion resistance, high accuracy, low cost, low power consumption and high electromagnetic interference resistance, and can be used in the fields of gas density measurement, liquid concentration measurement, bio-protein cell detection and the like.

Description

technical field [0001] The invention belongs to the technical field of micro-opto-mechanical systems, in particular to an integrated probe type microsphere cavity sensor. Background technique [0002] Whispering gallery mode (WGM) high-Q optical microcavities have been extensively studied. In the whispering gallery optical transmission mode, the laser propagates along the great circle of the optical microcavity in a way of total reflection, so only a very small part of the light energy in the microcavity leaks out of the cavity, thus forming a high-Q optical mode propagating along the interface. The ultra-high Q value makes this type of optical microcavity applicable to low-threshold laser emission, high-sensitivity sensors, optical communication devices and other fields. [0003] However, traditional microsphere cavity optical mode excitation needs to rely on external couplers for coupling, such as tapered optical fibers. The components of this coupling system (microspher...

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to overcome the shortcomings of existing microcavities that rely on tapered optical fibers for optical mode excitation and struct

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