Wave type optical modulator based on embedded coplanar waveguide (CPW) structure
A technology of coplanar waveguide and optical modulator, which is applied in the field of optical communication, can solve the problem of high half-wave voltage, achieve low microwave loss, good stability, and improve the effects of overlap factor and DC bias drift
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[0014] The present invention proposes a traveling-wave optical modulator based on an embedded coplanar waveguide electrode structure, the structure of which is as follows figure 1 shown. Polymer 1 with electro-optic effect is used to complete the optical waveguide and Y by spin-coating lower cladding layer 7, spin-coating core layer 1 and photoresist, photolithography, reactive ion beam etching, and spin-coating upper cladding layer 6 on the substrate. For the fabrication of branches, coplanar waveguide electrodes 2 are arranged on both sides of two parallel optical waveguides, and transition electrodes 3 are used to connect the electrodes 4 and 5 in the input / output area to the K connector.
[0015] The polymer is fabricated using an integrated optoelectronic process. The upper electrode is made by vacuum coating technology, and the polarization of the polymer adopts the parallel plate electrode polarization method.
[0016] The working principle of a traveling-wave optical...
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