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Wave type optical modulator based on embedded coplanar waveguide (CPW) structure

A technology of coplanar waveguide and optical modulator, which is applied in the field of optical communication, can solve the problem of high half-wave voltage, achieve low microwave loss, good stability, and improve the effects of overlap factor and DC bias drift

Inactive Publication Date: 2011-04-06
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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Problems solved by technology

[0006] In view of the high half-wave voltage of the existing common coplanar waveguide optical modulator, the present invention proposes an embedded coplanar waveguide electrode structure, which not only has the advantages of the traditional coplanar waveguide, but also improves the overlap factor and DC bias Drift problem

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  • Wave type optical modulator based on embedded coplanar waveguide (CPW) structure
  • Wave type optical modulator based on embedded coplanar waveguide (CPW) structure
  • Wave type optical modulator based on embedded coplanar waveguide (CPW) structure

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Embodiment Construction

[0014] The present invention proposes a traveling-wave optical modulator based on an embedded coplanar waveguide electrode structure, the structure of which is as follows figure 1 shown. Polymer 1 with electro-optic effect is used to complete the optical waveguide and Y by spin-coating lower cladding layer 7, spin-coating core layer 1 and photoresist, photolithography, reactive ion beam etching, and spin-coating upper cladding layer 6 on the substrate. For the fabrication of branches, coplanar waveguide electrodes 2 are arranged on both sides of two parallel optical waveguides, and transition electrodes 3 are used to connect the electrodes 4 and 5 in the input / output area to the K connector.

[0015] The polymer is fabricated using an integrated optoelectronic process. The upper electrode is made by vacuum coating technology, and the polarization of the polymer adopts the parallel plate electrode polarization method.

[0016] The working principle of a traveling-wave optical...

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Abstract

The invention provides a wave type optical modulator based on an embedded coplanar waveguide (CPW) structure, relating to a design technology of electrooptical modulator waveguide and electrode, and belonging to the technical field of optical communication. The wave type optical modulator is used for solving the technical problems of strengthening push-pull efficiency of a polymer electrooptical modulator, improving overlap factors, increasing modulation bandwidth and realizing high-speed modulation. In the wave type electrooptical modulator electrode structure of the invention, a polymer optical waveguide core is arranged among the electrodes to constitute an embedded CPW electrode structure; meanwhile, a 1 / 4 elliptical line is used to realize a transition region. Compared with the traditional electrooptical modulator, the influence on claddings is reduced among the electrodes, thereby improving the push-pull efficiency and drifting of direct current bias. 1 / 4 elliptical electrodes are used as transition electrodes, thus effectively reducing reflection loss of the electrodes, obviously improving bandwidth of the modulator, and lowering half-wave voltage of the modulator.

Description

technical field [0001] The invention relates to the design technology of waveguide and electrode of an electro-optic modulator, belongs to the technical field of optical communication, and relates to integrated optics and optical waveguide technology. Background technique [0002] Traveling-wave electro-optic modulator is the core of high-speed optical communication system. The frequency response characteristic of the electro-optic modulator directly determines the signal transmission speed of the system. The frequency response of the electro-optic modulator can be effectively enhanced by optimizing the electrode design of the electro-optic modulator. [0003] At present, the main factors limiting the modulation rate of traveling-wave electro-optic modulators are speed mismatch, electrode loss, and impedance mismatch. [0004] The electrodes in the previous electro-optic modulators adopt a coplanar waveguide (CPW) structure, because there is a buffer layer between the elec...

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Application Information

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IPC IPC(8): G02F1/065
Inventor 张晓霞朱燕张成裕黄春阳文玥沈杰
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA