Optical control integrated on-chip inductor

Abstract

The invention provides an optical control integrated on-chip inductor, belonging to the technical field of microelectronic devices. An optical control inductor structure comprises a photomagnetic material, a metal wire, a silica isolation layer and a silicon substrate, wherein a photomagnetic material coil layer represents a main body of an optical control on-chip inductor and is arranged on the substrate, the photomagnetic material senses lighting change, results in change of overall magnetic conductivity of the coil through change of the magnetic conductivity, so as to change inductance. A silica insulating layer is added between the inductor coil and the substrate, and is used for isolating eddy loss of the substrate, further, the metal wire is made of a highly conductive material, so that ohmic loss of the metal is reduced, quality factor of the inductor is improved greatly, and overall performance of the circuit is improved.

Description

technical field [0001] This patent belongs to the technical field of microelectronic devices, and relates to an optically controlled integrated on-chip inductor. Background technique [0002] On-chip inductors are the basic passive components of radio frequency integrated circuits, and their shapes are as figure 1 As shown, it realizes the conversion and storage of electric energy to magnetic energy, and is widely used in various RF front-end modules such as low-noise amplifiers, voltage-controlled oscillators, mixers, and filters, forming the basis of wireless communication. However, the on-chip inductor is a fixed coil, and the shape, size, wire diameter, and number of turns of the coil have been determined. Under the condition of a certain frequency, the inductance value of the on-chip inductor can only be a certain value. Can't change. The inductor is affected by many parasitic effects such as the ohmic loss of the metal itself, the eddy current loss of the semiconduct...

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Problems solved by technology

However, the on-chip inductor is a fixed coil, and the shape, size, wire diameter, and number of turns of the coil have been determined. Under the condition of a certain frequency, the inductance value of the on-chip inductor can only be a certain value. cannot change

The inductor is affected by many parasitic effects such as the ohmic loss of the metal itself, the eddy current loss of the semiconductor substrate, and the dielectric coupling capacitance. The large amount of electromagnetic loss of the inductor at high frequencies greatly reduces the quality factor Q of the inductor, resulting in poor circuit frequency stability. , high noise levels, etc., which greatly degrades the overall circuit performance

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