The application belongs to the technical field of thin film
inductance and magnetron
sputtering, and particularly relates to a three-dimensional spiral variable thin film
inductance and a preparation method thereof. The
inductance comprises a racetrack type
magnetic core, the
magnetic core comprises oppositely arranged first and second long arms, oppositely arranged first and second
short arms, a plurality of first spiral coils arranged on the first
long arm, and a plurality of second spiral coils arranged on the second
long arm. Each first
spiral coil is provided with contacts at both ends, adjacent first spiral coils are connected in series through shared contacts located between the two, each second
spiral coil is provided with contacts at both ends, and adjacent second spiral coils are connected in series through shared contacts located between the two. The
magnetic core is a high-entropy
alloy magnetic core, and the high-entropy
alloy composition comprises Zr and / or B, Fe, Co and Ni. The application can supply power to each coil individually or to the combination of multiple coils through the contacts, and has stronger design and application flexibility.