Three-dimensional miniature super capacitor electrode manufactured from nano porous composite material and manufacturing method thereof

Abstract

The invention relates to a three-dimensional miniature super capacitor electrode manufactured from a nano porous composite material and a manufacturing method thereof, which belong to the technical field of miniature energy-storing appliances and microelectronic mechanical processing. In the three-dimensional miniature super capacitor electrode, a silicon dioxide insulating layer, a metal currentcollecting and extracting layer and an electrode active material layer are sequentially formed on a silicon substrate to form the super capacitor electrode with a three-dimensional structure. The manufacturing method comprises the following steps of: forming a groove with a certain length, width and depth ratio on the silicon substrate through the micro-electromechanical systems (MEMS) etching technique; adhering an electrode active material and a conducting reinforcing agent through an organic adhesive; piling in the groove to form a self-supporting electrode; and etching the side wall of the self-supporting electrode to form the oppositely inserted three-dimensional electrode. The three-dimensional miniature super capacitor electrode adopts a three-dimensional electrode structure vertical to a chip area and extended in the third dimensional direction and has high microminiaturization degree and integration degree, so that the formed super capacitor can provide higher power output when compared with a battery and has better charge and discharge recyclability and higher charge and discharge efficiency.

Description

technical field [0001] The invention belongs to the technical field of micro-energy storage devices and micro-electronic machining, and in particular relates to a three-dimensional micro-supercapacitor electrode of a nano-porous composite material and a manufacturing method thereof. Background technique [0002] A supercapacitor (Super-capacitor, Ultra-capacitor, Electrochemical capacitor) is an electrical energy storage device that uses the electric double layer effect and pseudocapacitance (Pseudocapacitance) effect generated by the contact interface between the electrode and the electrolyte to store energy. The battery can provide higher power output, and has better charge and discharge cycle and higher charge and discharge efficiency. In micro-electro-mechanical systems (MEMS), whether micro-supercapacitors are used as a supplement to micro-batteries to achieve micro-energy management, or as a power supply to power micro-systems, their applications have great potential. ...

AI Technical Summary

Problems solved by technology

[0003] The micro-supercapacitor realized by H.In et al. in 2006 adopts a sandwich structure [1] , which is not easily scalable in the third dimension perpendicular to the chip

Since then, the electrodes of micro-supercapacitors mostly adopt finger-type structures, such as W.Sun et al. in 2009 [2] , and the results of D.Pech et al. in 2010 [3] , however, the process to achieve this structure still does not have good three-dimensional scalability, and only thinner electrodes can be achieved

Y.Q. Jiang respectively in 2009 [4] and 2010 [5] Published results, which use vertically grown carbon nanotube forests to realize micro-supercapacitor electrodes that can extend to the third dimension. However, the electrode material itself has a very low volume density, and the energy storage per unit volume is not high.

The above problems will cause the performance limitation of the micro-supercapacitor on the unit chip area.

Furthermore, the incompatibility of the manufacturing process [2] and the high temperature during electrode formation [4，6] It is also a problem in the current research

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