Terahertz wave photochopper based on silicon-based vanadium oxide thin film and using method thereof
A technology of vanadium oxide film and chopper, which is applied in the field of terahertz chopper, can solve the problems of mechanical choppers such as hard to compress volume, hard work, and limited speed, and achieve the advantages of easy miniaturization, fast modulation speed and stable mode Effect
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[0014] The specific implementation of the terahertz optical chopper based on silicon-based vanadium oxide thin film is as follows:
[0015] First, a silicon-based vanadium oxide thin film is prepared. Choose high-resistance silicon wafers with single-sided polishing and crystal orientation in the direction of , and the resistivity p>1000Ω / cm 2 , thickness 600 microns. The formation of vanadium oxide film is at the ratio of argon to oxygen Ar:O 2 =48:0.8 (sccm), pressure 2Pa, magnetron sputtering at room temperature for 2 hours, the film thickness is 620nm.
[0016] The prepared silicon-based vanadium oxide thin film 2 was placed 5 mm in front of the terahertz focus of the terahertz time-domain spectroscopy system. The laser light emitted by the laser diode 4 is irradiated onto the surface of the silicon-based vanadium oxide thin film 2 through a lens 3 with a focal length of 50 cm. The black shading plate 1 blocks the reflected laser light to avoid damage to human eyes. B...
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