2 results about "Vanadium oxide thin films" patented technology

The application provides a method for preparing an M-phase VO2 film by a light-assisted spray pyrolysis method and the M-phase VO2 film prepared by the method, and belongs to the field of nanometer materials. The method comprises the following steps: (1) preparing a vanadium dioxide spraying liquid: adding vanadium oxyacetonylacetone into anhydrous methanol, stirring and aging to obtain a vanadium dioxide spraying liquid with ultraviolet photosensitive properties; (2) preparing a vanadium dioxide film: introducing the vanadium dioxide spraying liquid in step (1) into an atomizer and spraying onto a substrate coated with a TiO2 anatase phase under ultraviolet light irradiation to obtain the M-phase VO2 film. The method enables vanadium ions to be chelated in the sol by stirring, and the vanadium dioxide spraying liquid has ultraviolet photosensitive properties. The purity of the VO2(M) film is improved by introducing a titanium dioxide transition layer, and the microstructure of the VO2(M) film is improved by ultraviolet light irradiation, thereby improving the visual transmittance and solar light regulation rate of the VO2(M) film.

This invention belongs to the field of micro / nano fiber fabrication technology. It discloses a vanadium dioxide-based micro / nano fiber temperature sensor and its fabrication method, including the following steps: (1) After removing a portion of the coating layer on the surface of a single-mode fiber, the fiber cladding in the area where the coating layer has been removed is etched or the area where the coating layer has been removed is heated and stretched using a melt stretching method to obtain a micro / nano fiber; (2) Vanadium metal is deposited onto the etched or stretched area of ​​the micro / nano fiber by magnetron sputtering to obtain a vanadium metal film with a nanometer-level thickness; (3) The deposited micro / nano fiber is annealed in an inert atmosphere to transform the vanadium metal film into an M-phase vanadium dioxide film, thereby obtaining a micro / nano fiber temperature sensor. This invention uses a method of magnetron sputtering to deposit a metal film followed by tube furnace annealing to obtain a vanadium dioxide thin film. The vanadium dioxide thin film can be prepared in a controllable manner, and the pure vanadium dioxide M-phase thin film can be prepared stably and repeatedly. Moreover, the thickness of the coating can be selected independently.