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Preparation method of high-purity enriched 11B boron trifluoride gas

A technology of boron trifluoride and boron trifluoride methyl ether, which is applied in the direction of boron halide compounds, can solve the problems of long and cumbersome process routes, and achieve the effects of long process routes, simple process and stable performance

Active Publication Date: 2011-07-06
DALIAN BORONTEN SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The process route of this method is long and cumbersome, and the yield of preparing sodium fluoroborate is only about 60%.

Method used

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  • Preparation method of high-purity enriched 11B boron trifluoride gas
  • Preparation method of high-purity enriched 11B boron trifluoride gas
  • Preparation method of high-purity enriched 11B boron trifluoride gas

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0025] preparation 11 B abundance 95% (at.) high purity 11 B boron trifluoride gas, raw materials used for production enrichment 10 produced in the course of B 11 B boron trifluoride methyl ether complex ( 11 B abundance ≥ 90% (at.)), using the chemical exchange method to enrich in the high-efficiency distillation tower in series with two towers 11 b. Make 11 The abundance of B reaches 95% (at.), thus 11 Prepared by direct reaction of B complex with sodium fluoride 11 B sodium fluoroborate, then by 11 B sodium fluoroborate is thermally decomposed 11 B boron trifluoride gas. Prepared 11 B boron trifluoride gas, measured 11 The abundance of B is 95.5% (at.), and the purity is 99.99vol%;

[0026] Preparation of the present invention 11B abundance 95% (at.) high purity 11 B boron trifluoride gas, the preparation method steps are as follows:

[0027] (1) Enrichment 11 B abundance reaches 95% (at.): Separation and enrichment 11 The B isotope is carried out in a ...

Embodiment 2

[0031] preparation 11 B abundance 97% (at.) high purity 11 B boron trifluoride gas, raw materials used for production enrichment 10 produced in the course of B 11 B boron trifluoride methyl ether complex ( 11 B abundance ≥ 90% (at.)), using the chemical exchange method to enrich in the high-efficiency distillation tower in series with two towers 11 b. Make 11 The abundance of B reaches 97% (at.), thus 11 Formed by reaction of B complex with sodium fluoride 11 B sodium fluoroborate, reheated 11 B sodium fluoroborate is decomposed 11 B boron trifluoride gas. Prepared 11 B boron trifluoride gas 11 The abundance of B is 97.3% (at.), and the purity is 99.99vol%;

[0032] The preparation method steps are as follows:

[0033] (1) Enrichment 11 B abundance reaches 97% (at.): Separation and enrichment 11 The B isotope is carried out in a high-efficiency distillation tower with two towers connected in series. The height of the tower is 13 meters, and the inner diame...

Embodiment 3

[0037] preparation 11 B abundance 99% (at.) high purity 11 B boron trifluoride gas, raw materials used for production enrichment 10 produced in the course of B 11 B boron trifluoride methyl ether complex ( 11 B abundance ≥ 90% (at.)), using the chemical exchange method to enrich in the high-efficiency distillation tower in series with two towers 11 b. Make 11 The abundance of B reaches 99% (at.), thus 11 Formed by reaction of B complex with sodium fluoride 11 B sodium fluoroborate, reheated 11 B sodium fluoroborate is decomposed 11 B boron trifluoride gas. Prepared 11 B boron trifluoride gas 11 The abundance of B is 99.2% (at.), and the purity is 99.99vol%;

[0038] The preparation method steps are as follows:

[0039] (1) Enrichment 11 The abundance of B reaches 99% (at.), separation and enrichment 11 The B isotope is carried out in a high-efficiency distillation tower with two towers connected in series. The height of the tower is 16 meters, and the inn...

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Abstract

The invention relates to a high-purity enriched 11B boron trifluoride gas and a preparation method thereof. The preparation method comprises the step of enriching the 11B in a double-tower in-series high-efficiency rectifying tower by a chemical exchange method by using a mass of 11B boron trifluoride methyl ether generated during producing the enriched 11B and taking the part of a byproduct as a raw material. The abundance of the 11B is higher than 95% (at.), and the purity is higher than 99wt%. Therefore, the 11B boron trifluoride methyl ether coordination compound is directly reacted with the sodium fluoride to obtain the 11B sodium fluoborate, so that the technical process is simple, the product purity is high, and the yield of the 11B sodium fluoborate is greatly improved. The 11B sodium fluoborate is directly heated at 600-700DEG C to be thermally decomposed so as to obtain the 11B boron trifluoride gas. The abundance of the prepared boron trifluoride gas 11B is higher than 95% (at.), and the purity is higher than 99.99vol%.

Description

technical field [0001] The invention relates to the technical field of semiconductor materials, in particular to a high-purity enrichment 11 B The preparation method of boron trifluoride gas. Background technique [0002] Natural boron contains two isotopes: 10 B and 11 b. 10 The natural abundance of B is 19.6% (at.), 11 The natural abundance of B is 80.4% (at.). 11 B has the effect of passing neutrons and gamma rays. Will 11 The abundance of B is increased to 95% (at.), and then prepared into high-purity boron trifluoride gas, which can be used in the production of high-efficiency solar panels; when 11 When the abundance of B reaches more than 99% (at.), use this 11 B Boron trifluoride gas is widely used in the semiconductor manufacturing industry as a boron dopant for silicon ion implantation, which can produce highly integrated and high-density microchips with smaller volume and better performance. [0003] Generally, there are four methods for the preparation of...

Claims

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Application Information

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IPC IPC(8): C01B35/06
Inventor 吴旭光朱心才韩晓辉
Owner DALIAN BORONTEN SCI & TECH
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