Method and equipment for efficiently purifying polysilicon powder by utilizing electron beams
A technology of polysilicon and electron beams, applied in chemical instruments and methods, silicon compounds, inorganic chemistry, etc., can solve problems such as uneven distribution of impurities, achieve rapid removal of impurities, achieve phosphorus and metal removal, and achieve the effect of simple methods
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Embodiment 1
[0019] A method for efficiently purifying polysilicon powder with electron beams. The carrier high-purity silicon material forms a high-purity silicon molten pool under electron beam heating, and then continuously adds silicon powder to be purified, and electron beams melt the silicon powder to quickly remove impurities in the silicon powder. Phosphorus, low-phosphorus silicon liquid overflows into the ingot pulling mechanism to pull the ingot to achieve the directional solidification effect. The steps are as follows:
[0020] The first step of material preparation: put the high-purity silicon material with low phosphorus and low metal into the smelting crucible with cooling at the bottom, open the powder loading cover 1 and add the high phosphorus and high metal silicon powder 24 to be purified into the powder loading bucket 25, Close the powder loading cover 1, close the vacuum cover 5;
[0021] The second step of pretreatment: vacuumize the vacuum chamber 3, and use vacuum ...
Embodiment 2
[0024] like figure 1 The described equipment for efficiently purifying polysilicon powder by electron beams comprises vacuum equipment consisting of a vacuum cover 5, a furnace wall 4 and a powder loading cover 1. The inner cavity of the vacuum equipment is a vacuum chamber 3; the upper part of the vacuum chamber is equipped with a powder loading bucket , the top of the powder loading barrel has a powder loading cover, the powder loading cover is located on the wall of the vacuum furnace, the bottom of the powder loading bucket has a discharge port, and the discharge port is equipped with an external drive powder baffle 22, an external drive powder baffle 22 It is an L-shaped powder baffle. One end of the powder baffle is rotated and installed in the rotating mechanism 23. The rotating mechanism 23 is installed outside the vacuum furnace wall. A melting crucible is installed at the bottom of the outlet of the powder loading barrel. The bottom of the crucible is fixed on the bo...
Embodiment 3
[0026]The equipment described in Example 2 is used to efficiently purify polysilicon powder with electron beams. The first step is to prepare materials: put high-purity silicon materials with a phosphorus content of 0.00004% and a total metal content of 0.0002% into a water-cooled copper crucible 17, low in phosphorus, The amount of low-metal high-purity silicon material is three-quarters of the height of the water-cooled copper crucible 17, and the powder baffle 22 is rotated to the bottom of the powder loading bucket 25 by the rotating mechanism 23 to block the bottom of the powder loading bucket 25 Tribe the powder hole, open the powder loading cover 1 and add high phosphorus and high metal silicon powder 24 in the powder loading bucket 25, the high phosphorus and high metal silicon powder 24 loading is slightly lower than the position on the upper edge of the powder loading bucket 25, close the loading Powder cover 1, close vacuum cover 5;
[0027] The second step of pretr...
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