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Carbon/carbon heat screen of polysilicon hydrogenation furnace and manufacture method thereof

A technology of heat shield and polysilicon, applied in silicon and other directions, can solve the problems of inability to withstand the high pressure of the hydrogenation furnace, poor sealing performance of the heat shield, and difficult installation, etc., and achieve low ash content, good heat insulation performance, and reduced raw material consumption. Effect

Inactive Publication Date: 2011-08-31
HUNAN NANFANG BOYUN NOVEL MATERIAL
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The heat shield prepared by this method has poor airtightness, cannot bear the high pressure in the hydrogenation furnace, and is difficult to install and easily damaged

Method used

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  • Carbon/carbon heat screen of polysilicon hydrogenation furnace and manufacture method thereof
  • Carbon/carbon heat screen of polysilicon hydrogenation furnace and manufacture method thereof
  • Carbon/carbon heat screen of polysilicon hydrogenation furnace and manufacture method thereof

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Effect test

Embodiment 1

[0037] The carbon / carbon composite polysilicon hydrogenation furnace heat shield embodiment is a carbon / carbon composite polysilicon hydrogenation furnace heat shield with a diameter of 1595mm, a height of 727mm, and a thickness of 130mm; it is composed of a heat shield body and a silicon carbide protective layer, so For the body structure of the heat shield, see figure 1 , is a kind of "sandwich" structure, the outer layer 1 and inner layer 3 are densified by 6K carbon fiber cloth, the middle layer 2 of the heat shield is densified by soft carbon felt; the silicon carbide protective layer is covered on the heat shield body surface.

[0038] Its preparation method is as follows:

[0039] (1) Make a heat shield steel tire membrane with a diameter of 1338mm and a height of 800mm;

[0040] (2) After the 6K carbon fiber cloth is evenly coated with furan resin, wrap it layer by layer on the steel tire membrane. When the thickness of the wrapping reaches 5mm, then wrap the soft ca...

Embodiment 2

[0052] (1) Make a heat shield steel tire membrane with a diameter of 1680mm and a height of 950mm;

[0053] (2) After the carbon fiber cloth is evenly coated with furan resin, wrap it layer by layer on the steel tire membrane. When the thickness of the wrapping reaches 4mm, then wrap the soft carbon felt soaked with furan resin layer by layer. When the thickness reaches 1808mm, the carbon fiber cloth evenly coated with furan resin is wound on the soft carbon felt layer by layer. When the overall thickness of the winding is equal to 1810mm, the winding process is completed, and then the external force is used to compact it to form a kind of "sandwich sandwich". ” structure of the heat shield body blank;

[0054] (3) Put the heat shield body blank obtained in step (3) together with the steel tire film into an oven for curing, the treatment time is 320 minutes, and the curing temperature is 180°C to obtain a heat shield body blank;

[0055] (4) Put the heat shield body blank wit...

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Abstract

The invention discloses a carbon / carbon heat screen of a polysilicon hydrogenation furnace and a manufacture method thereof. A carbon / carbon heat screen body of the polysilicon hydrogenation furnace is of a sandwich structure, an outer surface layer and an inner surface layer of the heat screen body are formed by densifying three-dimensional integral needled carbon felts or carbon fabrics with density of more than or equal to 1.2g / cm<3>, a middle layer of the heat screen body is formed by densifying carbon felts with density of less than or equal to 0.25g / cm<3>, and a silicon carbide protective layer is coated on the surface of the heat screen body. The manufacture method comprises the following steps of: 1, manufacturing a heat screen steel loose tooling according to the design requirement; 2, preparing a heat screen body blank; 3, curing; 4, carbonizing; 5, demoulding the steel loose tooling; 6, carrying out CVD (Chemical Vapor Deposition) densifying treatment; 7, machining two ends of the heat screen; 8, coating the silicon carbide protective layer; and 9, carrying out high-temperature purification treatment. The carbon / carbon heat screen of the polysilicon hydrogenation furnace has better heat-insulation performance, corrosion resistance and scouring resistance, high mechanical strength, long service life, and low production cost because of being manufactured by using a pure-molding and less-cutting process.

Description

technical field [0001] The invention relates to a heat shield for a polysilicon hydrogenation furnace and a preparation method thereof, in particular to a carbon / carbon composite polysilicon hydrogenation furnace heat shield and a preparation method thereof. Background technique [0002] In the photovoltaic industry, polycrystalline silicon wafers occupy the dominant position of solar cells with the advantages of high production capacity, low energy consumption and low cost. At present, in the production of polysilicon products, the hydrogenation furnace is the by-product SiCl generated in the process of producing polysilicon products in the circulating system. 4 with H 2 The reaction produces SiHCl 3 Important equipment for the reuse of raw materials. In the hydrogenation furnace, the industrial exhaust gas is SiCl 4 Usually, bottom air intake or side air intake is used, the furnace pressure is 5-7 kg, and the temperature is above 1200 ° C and H 2 After the reaction oc...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B33/03C04B35/83C04B41/85
Inventor 蒋建纯肖志英张弛潘纯纯陈志军
Owner HUNAN NANFANG BOYUN NOVEL MATERIAL
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