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Preparation method of organic multilayer film

A multi-layer thin-film, organic technology, applied in semiconductor/solid-state device manufacturing, semiconductor devices, electrical components, etc., can solve problems affecting the luminous efficiency of organic materials, device performance, damage, etc., and achieve the effect of overcoming adverse effects and improving performance.

Inactive Publication Date: 2011-09-14
INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] Considering many factors such as process difficulty, film performance, material utilization, preparation method limitations, and production costs, the above organic film growth methods have some shortcomings.
Especially in the device manufacturing process, after the completion of the growth of the organic film, the evaporation of the metal electrode (anode or cathode) needs to be completed. The production of the metal electrode is generally carried out by evaporation or sputtering; in the process of depositing the organic film, High-energy metal atoms or ions will damage the organic molecular structure to a certain extent, affecting the luminous efficiency and device performance of organic materials that are in direct contact with metal electrodes

Method used

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  • Preparation method of organic multilayer film
  • Preparation method of organic multilayer film
  • Preparation method of organic multilayer film

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Embodiment 1

[0015] The present invention proposes a kind of preparation method of organic multilayer thin film, comprises the steps:

[0016] Step 101: preparing metal electrodes on the two substrates by evaporation or sputtering;

[0017] Such as figure 1 As shown, the metal anode or metal cathode electrode of the substrate is prepared by evaporation or sputtering, and the process flow is as follows: First, an indium tin oxide (ITO) metal anode is prepared on a substrate by evaporation or sputtering, with a thickness of 3500 angstroms, during the completion of the ITO evaporation process, the metal alignment mark of the anode electrode is made; then, on another substrate, the aluminum (Al) metal cathode electrode is also prepared by evaporation or sputtering, with a thickness of 4000 angstroms, and after the completion of the aluminum During the evaporation process, make the metal alignment mark of the cathode electrode;

[0018] Step 102: Deposit different organic thin films on the me...

Embodiment 2

[0025] The difference between this embodiment and Embodiment 1 is that: Embodiment 1 heats two substrates, and this embodiment only heats one substrate. In this embodiment, the preparation of the substrate metal anode or metal cathode, the deposition of the metal anode or metal cathode organic thin film, and the alignment and contact of the substrate organic thin film are all the same as steps 101-103 in Embodiment 1. , which will not be described in detail in this embodiment. The differences between this embodiment and embodiment 1 are as follows:

[0026] Step 104': heating one substrate, and applying pressure in opposite directions to the two substrates after the temperature of the substrate enters a preset temperature range;

[0027] The preset temperature range can be the glass transition temperature range of the organic thin film; in this embodiment, the metal anode substrate of indium tin oxide is not heated, only the aluminum metal cathode electrode substrate is heate...

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Abstract

The invention discloses a preparation method of an organic multilayer film, and belongs to the technical field of organic multilayer film preparation. The preparation method comprises the following steps of: depositing different organic substance films on metal electrodes of two substrates; aligning and contacting the organic substance film layers of the two substrates, and heating at least one of the substrates; and when the temperature of at least one of the substrates enters a preset temperature range, applying opposite pressures to the two substrates. In the preparation method, the low-temperature growth of the organic film is performed after the manufacturing process of the metal electrodes is finished, the adverse effect, caused by high-energy metal atoms or ions, on the performance of an organic molecular film in the manufacturing process of the metal electrodes is overcome, and the performance of an organic device is improved to the utmost extent in device manufacturing.

Description

technical field [0001] The invention relates to the technical field of preparation of organic multilayer films used in the manufacture of organic devices, in particular to a method for preparing organic multilayer films by means of temperature control and pressure. Background technique [0002] The preparation method and device manufacturing technology of organic thin films in organic electroluminescent devices are very important, which have a great impact on device performance. Different device manufacturing technologies directly affect the working efficiency of devices, and different preparation methods directly affect devices in industrialization. preparation cost. According to different materials, organic small molecules are often used to prepare thin films by vacuum evaporation, and polymer materials are often used to prepare thin films by spin coating. With the development of the preparation process of organic electroluminescent devices, other preparation processes ha...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L51/00H01L51/56H10K99/00
Inventor 刘键
Owner INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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