Manufacturing method of full back electrode solar cell

Abstract

The invention relates to a manufacturing method of a full back electrode solar cell. According to the invention, after a damaged layer of a silicon chip is removed and a texturing process is carried out on a right side of the silicon chip, a phosphorus diffusion process is carried out on the silicon chip, and a right side filed and a back side field are formed. Oxide films are respectively formedon the right side and the back side of the silicon chip. And then, a part of the oxide film and a part of the back side field at the back of the silicon chip are removed, wherein the part of the oxide film and the part of the back side field are at a place where an electrode of an emitter electrode is needed to be formed; and meanwhile, another part of oxide film and another part of back side field are kept, wherein the another part of oxide film and the another part of back side field are at a place where a base electrode is needed to be formed. At last, by using the kept oxide film as a mask, a diffusion process is carried out on the back side of the silicon chip, wherein the processed area is where the oxide film and the back side field have been removed, so that the emitter electrode is formed. The full back electrode solar cell, which is produced by the method provided in the invention, has advantages of simple technology and high cell efficiency; besides, the assembly of the solar cell is easy to be welded. In addition, because the technology employed by the invention does not require especially-designed equipment, the cost is low, and produced production has good homogenization. Therefore, the manufacturing method of the full back electrode solar cell is suitable for large-scale industrialization production and application.

Description

technical field [0001] The invention relates to a method for manufacturing a solar cell, in particular to a method for manufacturing a full-back electrode solar cell, and belongs to the field of solar cell manufacturing. Background technique [0002] A solar cell is a semiconductor component that converts sunlight into electricity, so the efficiency of a solar cell is closely related to the light absorption of the solar surface. [0003] In the manufacturing process of crystalline silicon solar cells, there are often many metal grid lines on the light-receiving surface of the solar cells obtained in the conventional manufacturing process, and the purpose is to collect current and serve as soldering points of components. On the one hand, the existence of the metal grid lines blocks the absorption of sunlight and reduces the conversion efficiency of the battery. On the other hand, during the production process of the module, because the positive and negative electrode pads are...

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Problems solved by technology

However, during the subsequent high-temperature diffusion of the dopant source printed on the back of the solar cell, the phosphorus-rich gas in the furnace will not only diffuse to the front of the solar cell, but also affect the dopant printed on the back of the solar cell. The influence of the source makes it difficult to control the doping diffusion on the back side accurately, thus affecting the uneven quality of the final solar cell, which is v

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