Metallization process and welding method for pyrolytic graphite

A technology of pyrolytic graphite and process method, which is applied in the direction of metal material coating process, metal processing equipment, welding equipment, etc. to achieve the effect of promoting development

Inactive Publication Date: 2013-01-02
INST OF ELECTRONICS CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0011] The purpose of the present invention is to provide a metallization process and welding method of pyrolytic graphite to solve the problem of hermetic sealing of pyrolytic graphite materials with ceramics or other metals

Method used

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  • Metallization process and welding method for pyrolytic graphite
  • Metallization process and welding method for pyrolytic graphite

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Experimental program
Comparison scheme
Effect test

Embodiment

[0056] 1. Pretreatment of pyrolytic graphite substrate:

[0057] 1) Grinding with 500-mesh metallographic sandpaper, ultrasonic cleaning with alcohol for 3 minutes, and dehydration with acetone;

[0058] 2) Vacuumize to make the vacuum degree in the multi-arc vacuum ion plating tank reach 9×10 -3 Pa;

[0059] 3) Glow cleaning: Ar gas, bias voltage 1000V, add 1 minute;

[0060] 4) Perform ion bombardment cleaning: Ar gas, negative bias voltage 400V, 1 minute;

[0061] 2. Carry out the deposition of transition film layer (Cr layer) and surface film layer (Ni layer):

[0062] 1) Cr film deposition, using parameters: voltage 200V, 20 minutes;

[0063] 2) Ni film deposition, using parameters: voltage 150V, 40 minutes;

[0064] 3. Post-treatment of the coating:

[0065] 1) In a hydrogen furnace, heat up to 950°C at a heating rate of 10°C / min, hold for 5 minutes, and then cool with the furnace;

[0066] 2) After being out of the oven, the plated parts need to be stored in a co...

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Abstract

The invention discloses a metallization process and a welding method for pyrolytic graphite, and relates to a vacuum device technology. In the metallization method, a film is deposited on the surface of a pyrolytic graphite matrix by a vacuum multi-arc ion plating technology; and in the welding method, a pyrolytic graphite part and a part need to be welded are put into a hydrogen furnace to be welded. By alloying the surface of the pyrolytic graphite matrix, the pyrolytic graphite matrix can be well welded with ceramics or other metals, the airtight seal is achieved, the technical problem in the sealing is solved, and the development of microwave electronic vacuum devices is greatly promoted.

Description

technical field [0001] The invention relates to the technical field of vacuum devices, and relates to a metallization process and a welding method of pyrolytic graphite. Background technique [0002] Traveling wave tube is a microwave electric vacuum device, which has the characteristics of high reliability, wide frequency band and high efficiency. It has a wide range of applications in electronic countermeasures, radar, satellite communications and other fields. As a vacuum electronic device, it has been greatly challenged and threatened by semiconductor devices for many years, especially in terms of small and medium power. However, in the field of high power, especially ultra-high power, vacuum electronic devices still have extremely significant advantages. [0003] The deposition of pyrolytic graphite is a chemical vapor deposition reaction carried out under high temperature and vacuum conditions. When hydrocarbon gas (CH4, C3H8, CnHm) and diluent gas (N2, Ar, H2) are m...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/32B23K1/012
Inventor 马天军赵世柯苏小保邓峰胡京军王鑫
Owner INST OF ELECTRONICS CHINESE ACAD OF SCI
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