Method and device for producing electronic grade phosphorus oxychloride

Abstract

The invention discloses a method and device for producing electronic grade phosphorus oxychloride. The method comprises the following steps of: (1) putting technical grade phosphorus oxychloride into a container, adding a sodium bromide or hexadecyl trimethyl ammonium bromide additive into the container, uniformly stirring and conveying the mixture into a high-position storing tank through a conveying pump; (2) introducing the phosphorus oxychloride in the high-position storing tank into a sub-boiling distiller for performing sub-boiling distillation; (3) introducing a distilled product obtained in the step (2) into a half-finished product storing tank; (4) introducing the half-finished product in the storing tank into a rectifying tower; (5) boiling the half-finished product in the rectifying tower in the step (4) and performing total reflux, wherein high-boiling-point impurities are left in the rectifying tower; (6) introducing a phosphorus oxychloride cut fraction into a finished product storing tank, oxidizing, reflowing into the rectifying tower, and performing complete gas-liquid mass transfer separation; and (7) introducing the phosphorus oxychloride product in the finishedproduct storing tank into a filter in a clean room for filtering to obtain the colorless and transparent electronic grade phosphorus oxychloride. According to the method and the device, the defects of the prior art can be overcome.

Description

technical field

[0001] The invention relates to a high-purity chemical material used in the microelectronics industry and the photovoltaic industry, and relates to a method for producing electronic-grade phosphorus oxychloride with a purity of 99.99999% and a device thereof. Background technique

[0002] Electronic grade phosphorus oxychloride is an ultra-pure reagent and ultra-high-purity material. It is a supporting material for large-scale integrated circuits and photovoltaic solar cells. In recent years, with the rapid development of the solar cell manufacturing industry, the consumption of electronic grade phosphorus oxychloride has been increasing year by year. Since the widely used production method of electronic grade phosphorus oxychloride is the chlorination hydrolysis method, this method is relatively easy to master compared with other methods, so all domestic enterprises basically use the same method. However, the disadvantages of this chlorination hydrolysis m...

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