Method for changing center frequency of filter with superconducting microstrip structure by adopting mask overlay

Abstract

The invention relates to a method for changing the center frequency of a filter with a superconducting microstrip structure by adopting mask overlay, and belongs to the technical field of microwave communication equipment. The method comprises the following steps of: performing primary simulation designing on a superconducting filter circuit structure according to required filter indexes, manufacturing the designed filter by adopting high-resolution photoetching and ion beam etching processes, comparing a tested response curve with a simulated response cure, modifying an effective dielectric constant in simulation parameters, performing secondary simulation, keeping an inter-resonator distance unchanged, decreasing the length of each resonator in the filter to make the center of a filter circuit with a decreased length reach a required frequency point; manufacturing a mask plate for the overlay, and exposing a cut part in a secondarily-simulated filter circuit pattern; and photoetching and etching the manufactured filter to obtain the filter with required center frequency. The method is accurate in result and low in cost; and simultaneously, good passband response is ensured, and the performance of the filter meets the requirements of actual application.

Description

technical field [0001] The invention belongs to the technical field of microwave communication equipment, and in particular relates to the design and tuning of microwave filters. Background technique [0002] A filter is a very important microwave component. Its main function is to separate frequencies, that is, to pass signals of a certain frequency and block signals of other frequencies. It is an indispensable part of microwave communication. Superconducting planar structure (microstrip, stripline, etc.) filters have low insertion loss, steep band edges, and high out-of-band rejection, and are closer to ideal filters in performance, and have a wide range of applications in mobile communications and weak signal detection. Application prospects. [0003] The center frequency and response characteristics of superconducting microstrip structure filters, especially narrowband superconducting filters, are sensitive to the thickness and dielectric constant of the dielectric subs...

AI Technical Summary

Problems solved by technology

Laser trimming technology requires multiple operations, has high requirements for process consistency, and is expensive

Images