Micro-energy system with high energy density per unit volume and fabrication method thereof

Abstract

The invention relates to a micro-energy system with high energy density per unit volume and a fabrication method thereof. The fabrication method of the system is characterized by comprising the following steps of: (a) drilling holes on a glass substrate by a diamond drill bit, wherein, the holes are two opposite hollow circular tables; (b) sputtering an Al membrane on the front face and rear face of the glass substrate so that the depth of a cavity is filled with the thickness of the Al membrane so as to realize double-sided Al interconnection; (c) sequentially depositing a cobalt-nickel nitride, a LiPON membrane, a Li membrane and an Al membrane on the rear face of Al; (d) arranging an energy management module and an RF (radio frequency) transceiver module on the surface of the Al membrane which is uncovered with a battery multilayer film; (e) sequentially depositing n-type microcrystalline silicon, i-type GexSi1-x (x is more than 0 and less than 1), p-type amorphous silicon and AZO containing 3% of Al on the Al surface of the front face of the glass substrate; and (f) connecting the AZO, a Li battery anode, an output end of the energy management module and an output end of the RF transceiver module by a Au line. In the invention, by adopting a sputtering deposit method, the energy density per unit volume of the obtained micro-energy system is more than 291.9W / L, which provides a technical means for node miniaturization of Internet of things, portability, long-time power supply and field application.

Description

technical field [0001] The present invention relates to a high volume specific energy density micro-energy system and a manufacturing method thereof, more specifically to a design of a high volume specific energy density micro-energy system that enables nodes of the Internet of Things to work normally under continuous cloudy conditions and preparation method. It belongs to the field of microelectronic technology. Background technique [0002] The miniaturization, distribution, and unattended sensor nodes of the Internet of Things are the future development trend. Special requirements are put forward for the volume, weight, power and working current of the energy source. There is an urgent need for small size, light weight, (volume ) micro energy source with high specific capacity to match it, and the monolithic integration of micro energy source and load will help to further improve the volume specific energy density of the micro system. [0003] Amorphous germanium silico...

AI Technical Summary

Problems solved by technology

[0006] The purpose of the present invention is to provide a kind of micro-energy system with high volume specific energy density and its manufacturing method, which solves the problem of the low volume energy density of existing micro-energy systems (such as polymer lithium batteries, usually the volume energy density is only 100-200Wh / L) problem

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