Wide spectrum high reflectivity irregularly shaped distributed Brag reflector (IDBR) and manufacturing method thereof

Abstract

The invention relates to a wide spectrum high reflectivity irregularly shaped distributed Brag reflector (IDBR) and a manufacturing method thereof. The IDBR is characterized in that: through growing m pairs of DBR (distributed Brag reflector)-A multilayer films of a centre wavelength of lambda1 (lambda1= 400-700 nm) on n pairs of DBR (distributed Brag reflector)-B multilayer films of a centre wavelength of lambda2 (lambda2= 700-1300 nm), the IDBR is formed. The DBR-A or DBR-B is formed by periodically alternative combination of amorphous silicon (or amorphous germanium-silicon alpha-Ge[x]Si[1-x], x is larger than 0 and is less than or equals to 1 ) and silicide or metal (including SN, SiO[2], Ag or Al) film, thick and thin layer thicknesses T[H] and T[L] are determined by formulas T[H]= lambda[1(2)] / (4n[H]) and T[L]= lambda[1(2)] / (4n[L]) respectively, and n[L] and n[H] represent thin and thick layer refraction coefficients respectively. The IDBR in the invention can realize a high average reflectivity of more than 89% in a wide spectrum range of a wavelength of 400nm to 1270 nm, and is suitable for an ultra-thin (less than or equals to 50 micrometers) crystal silicon solar cell and an ultra-thin film solar cell.

Description

technical field [0001] The invention relates to a wide-spectrum high-reflectivity irregularly shaped distributed Bragg (Irregularly shaped Distributed Brag Reflector, hereinafter referred to as IDBR) structure and a manufacturing method thereof. The invention belongs to the field of advanced energy technology. Background technique [0002] The solar cell industry has attracted widespread attention from governments, enterprises and research institutions for its cleanliness and sustainability. Over the past ten years, the photovoltaic industry has maintained strong growth, with an average growth rate of 40%. This growth rate is expected to remain at 25-40% over the next ten years. This will undoubtedly contribute to reducing the world's dependence on fossil fuels and reducing the CO associated with thermal power generation. 2 emissions are of great benefit. Currently, solar cells based on crystalline silicon dominate the photovoltaic market with a market share of more than...

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Problems solved by technology

However, it has almost no effect on the absorption of the main part of visible light at 300nm-650nm, and the process is quite complicated, and it uses an expensive photolithography process, which is not suitable for large-scale production

[0004] For the special-shaped distributed Bragg reflection structure, no relevant patents have been retrieved, and there have been no reports in the literature

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