Cold ion solar-grade polycrystalline silicon material purification method and apparatus thereof
A technology of solar energy level and purification method, which is applied in chemical instruments and methods, silicon compounds, inorganic chemistry, etc., can solve the problems of limited material transportation, limited treatment effect, and low ion energy, and achieve high energy, low cost, and high ion efficiency. high density effect
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Embodiment 1
[0051] In this embodiment, the background vacuum of the system is first evacuated to 1mTorr, and then the reaction gas (Ar:H 2 : HCl=98:1:1), the gas preheating temperature is 900°C. Adjust the pressure to normal pressure, and then apply a sinusoidal AC power supply with a voltage of 4kY and a frequency of 10kHz to the system. After the discharge is stable, the silicon material to be processed is filled into the system along with the carrier gas through the feeder of the air intake and feeding device 4 . In the embodiment, the silicon powder will be heated to 900° C. along with the carrier gas, so as to facilitate the solid phase diffusion in the particles. The average particle size of the particles is 50 μm. The average residence time of particles in the device is 360s. According to the condition of the silicon material itself, multi-stage purification or repeated purification can be implemented.
Embodiment 2
[0053] This embodiment is in 10 4To implement the experimental scheme under the relatively low vacuum degree of Pa, it is necessary to further reduce the particle size of the silicon material, and the average particle size of the silicon material particle is 1 μm, otherwise the average processing time will be shortened accordingly, which cannot meet the purification requirements. Other parameters are similar to Example 1.
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Abstract
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