Process and device for coating steel strip through ECR microwave plasma chemical vapor deposition

A technology of chemical vapor deposition and microwave plasma, applied in the direction of gaseous chemical plating, metal material coating process, coating, etc., can solve the problems of not seeing continuous strip steel coating, not finding, etc., to avoid pollution, ionization degree The effect of high and low substrate temperature
CN101514447AInactive Publication Date: 2009-08-26BAOSHAN IRON & STEEL CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
BAOSHAN IRON & STEEL CO LTD
Publication Date
2009-08-26
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses a process and device for coating a steel strip through ECR microwave plasma chemical vapor deposition and relates to the field of chemical plating. After being unfolded in the air and chemical pre-treatment or plasma pre-treatment, the steel strip enters an ECR microwave plasma chemical vapor deposition unit through a vacuum tunnel and a vacuum sealing device and then a precursor, a carrier gas and a reaction gas are introduced into the ECR microwave plasma chemical vapor deposition unit to generate plasma to coat the strip steel with a film; and after coating, the steel strip passes through a closed device and enters the air to be coiled completely and the whole coating process is finished. The process and the device can be used in the field of steel vacuum coating or on laboratory equipment. Given the industrialization of vacuum coating, the process and the method can be further promoted and have wide prospects.
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Description

technical field

[0001] The invention belongs to the field of chemical plating through the decomposition of gaseous compounds and the reaction product of the surface material does not remain in the plating layer, and more specifically to the field of chemical vapor deposition technology characterized by a plating method. Background technique

[0002] In the current automobile, construction, engineering and home appliance industries, steel plates with good surface properties are the key materials for these industries, and the existing strip steel coating technologies mainly include hot-dip galvanizing, electro-galvanizing, electro-tin plating, color coating and other coating processes , usually including chemical pretreatment and phosphating, passivation, anti-fingerprint coating and other pre- and post-treatment processes.

[0003] In recent years, the market's demand for steel plates with better surface properties has been increasing. At the same time, users have higher and ...

Claims

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