Physical purification method and device of metallic silicon
A kind of equipment and fluidized bed technology, applied in the physical purification method of metal silicon and its equipment field, can solve the problems of limited treatment effect, restricted material transportation, low ion density, etc., and achieve low cost, high energy and high ion density Effect
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Embodiment 1
[0051] In this embodiment, the background vacuum of the system is first evacuated to 1mTorr, and then the carrier gas (Ar:H 2 :HCl=98:1:1), the gas preheating temperature is 900℃. Adjust the pressure to normal pressure, and then apply a sinusoidal AC power supply with a voltage of 4kV and a frequency of 10kHz to the system. After the discharge is stable, the silicon material to be treated is filled into the system through the feed system 1 along with the carrier gas. In the embodiment, the silicon material powder will be heated to 900° C. with the carrier gas to facilitate the solid phase diffusion in the particles. The average particle size of the particles is 50 μm. The average residence time of particles in the device is 1h, and multi-stage purification or repeated purification can be implemented according to the condition of the silicon material itself.
Embodiment 2
[0053] This embodiment is under relatively low degree of vacuum (10 4 Pa) To implement the experimental plan, it is necessary to further refine the particle size of the silicon material (1μm), otherwise the average processing time will be shortened accordingly. Other parameters are similar to Example 1.
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