Preparation method of alignment carbon nano tube/polymer composite membrane
A technology of oriented carbon nanotubes and carbon nanotubes, which is applied in semiconductor/solid-state device manufacturing, photovoltaic power generation, electrical components, etc., can solve problems such as limiting the conductivity of composite films, achieve excellent flexibility and deformation ability, and be easy to operate. good controllability
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[0024] The specific process of preparation is as follows:
[0025] First, the synthesis of aligned carbon nanotube arrays.
[0026] The carbon nanotube arrays were prepared by chemical vapor deposition. First, a layer of Al is deposited on the silicon wafer by an electron beam evaporation coater. 2 o 3 and a layer of Fe, resulting in a structure of Si / SiO 2 / Al 2 o 3 (0.5~30 nm) / Fe(0.5~3 nm) catalyst. Then put the catalyst into the tube furnace, and pass in hydrogen and argon, then raise the temperature to 500~900°C and keep the temperature constant for 0.5~5 minutes. After the catalyst is matured, pass in the carbon source ethylene, where the flow rate of ethylene is 60 -290 sccm, Argon flow 400-620 sccm, Hydrogen flow 20-48 sccm. After continuing to keep the temperature for 5-100 minutes, it can grow on the silicon wafer with a height of 0.5-5 mm and a density of 10 10 ~10 11 cm -2 The carbon nanotube array in which the carbon nanotubes are highly oriented, has hi...
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