APD-TIA (Avalanche Photodiode-Transfer-Impedance Amplifier) coaxial photoelectric module with temperature control function and fabrication method thereof
A photoelectric component, coaxial technology, applied in semiconductor/solid-state device manufacturing, electrical components, electrical solid-state devices, etc., can solve the problems of sensitivity change of light-receiving components, achieving the best light multiplication state, and inability to compensate for noise, etc. Achieve the effects of stable light receiving sensitivity, long component life, and precise temperature control.
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[0050] The photoelectric component and manufacturing method of the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments of the present invention.
[0051] Take the existing 10Gb / s APD-TIA coaxial TO56 optoelectronic component as an example, the optoelectronic component has only 4 pins. Since the internal space of TO is very small, the following key problems must be solved to place multiple components such as thermoelectric cooler, thermistor, 10Gb / s APD and 10Gb / s TIA inside TO56:
[0052] a) The TO shell should have 8 pins (excluding the shell grounding pins). Since 4 more components need to be placed, and there must be two independent pins for RF output, the existing 4 pins The pins cannot meet the needs;
[0053] b) The interior of the TO base should be able to accommodate the TEC, which is the most basic condition;
[0054] c) TEC can meet the requirements of power dissipation, which is the requirement ...
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