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Method for measuring focal length of micro-lens array

A technology of microlens array and lens array, which is applied in the field of lens array focal length measurement, can solve problems such as low efficiency and complicated operation, and achieve the effects of low measurement cost, simple operation and high measurement efficiency

Inactive Publication Date: 2012-06-13
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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Problems solved by technology

This detection method has high precision, but the operation is complicated, and the focal length measurement of only one sub-aperture can be completed at a time, so the efficiency is low

Method used

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  • Method for measuring focal length of micro-lens array
  • Method for measuring focal length of micro-lens array
  • Method for measuring focal length of micro-lens array

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Embodiment Construction

[0036] The present invention is further described in conjunction with accompanying drawings.

[0037] figure 1The middle is a schematic diagram of the detection system and the focal length measurement method of the microlens array of the present invention. The monochromator 1 is used as a light source. The straight parallel light passes through the measured microlens array 4 to form a corresponding light spot on the focal plane of each sub-aperture, and the CCD detector 5 sequentially collects images along the optical axis near the focal plane to determine the focal plane position of each sub-aperture; Then the diffraction grating 3 is moved into the measured optical path, and the collimated light through the collimator 2 is incident on the diffraction grating 3, and after being diffracted and split by the diffraction grating 3, the diffracted light at all levels is in the measured microlens array 4 Each sub-aperture forms a corresponding diffraction spot, and the CCD detecto...

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Abstract

The invention provides a method for measuring the focal length of a micro-lens array. By means of definition function fixed-focus analysis, the focal length of the micro-lens array is measured by applying the principle of grating diffraction light splitting, after parallel incident light passes through a grating, high-order diffraction light can be neglected due to low light intensity, emergent light is split into a 0-class light beam, a +1-class light beam and a -1-class light beam, and the focal length of the micro-lens array is measured by measuring the center distance between a 0-class light spot and a +1-class light spot of sub-apertures of micro-lenses after grating light splitting. Besides, a plurality of sub-apertures can be measured by acquiring images once through the method, and the method is suitable for measuring the focal lengths of the micro-lenses with more arrays. As grating light splitting angles are determined by grating periods and measured wavelengths, compared with a traditional turning angle measuring method, the method needs no turntable and is simple, convenient and easy in operation.

Description

technical field [0001] The invention relates to the technical field of measuring the focal length of a lens array, in particular to a method for measuring the focal length of a microlens array, which can be used for measuring a microlens array with a short focal length and a large number of units. Background technique [0002] Microlens arrays are widely used in optical storage, optical coupling, and wavefront detection due to their high diffraction efficiency and wide operating wavelength. With the improvement of the microlens array processing technology, the microlens array is developing towards the direction of multi-unit number and miniaturization, and puts forward new requirements for the detection of the microlens array, which not only requires high measurement accuracy, but also requires high measurement efficiency. . At present, the focal length measurement of the microlens array mainly includes the aperture and sagittal height measurement calculation method, the re...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01M11/02
Inventor 朱咸昌伍凡曹学东吴时彬
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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