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TiAlSiN-DLC composite film and its preparation method

A composite thin film, 30min technology, applied in ion implantation plating, metal material coating process, coating, etc., can solve the problems of loss of protective film function, failure to meet high temperature wear resistance and friction reduction performance of material surface, peeling and other problems, to achieve Good high temperature oxidation resistance, good self-lubricating wear resistance and anti-friction performance, high microhardness and wear resistance

Inactive Publication Date: 2012-06-27
NORTHWEST INSTITUTE FOR NON-FERROUS METAL RESEARCH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the graphitization transition will cause a large amount of C to be released from the surface of the DLC film, which will eventually lead to the peeling of the DLC from the surface of the metal matrix material, losing its function as a protective film.
Therefore, a single DLC film cannot meet the high-temperature wear-resisting and friction-reducing properties of the material surface.

Method used

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  • TiAlSiN-DLC composite film and its preparation method
  • TiAlSiN-DLC composite film and its preparation method
  • TiAlSiN-DLC composite film and its preparation method

Examples

Experimental program
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Effect test

Embodiment 1

[0028] The process of preparing TiAlSiN-DLC composite film on the surface of ordinary high-speed steel substrate W18Cr4V:

[0029] Such as figure 1 As shown, the TiAlSiN-DLC composite thin film of this embodiment includes a TiAlSiN layer 2 attached to the surface of the metal substrate 1, a C-doped TiAlSiN layer 3 attached to the TiAlSiN layer 2, and a C-doped TiAlSiN layer 3 attached DLC layer 4; the metal substrate is an ordinary high-speed steel substrate, the thickness of the TiAlSiN layer 2 is 0.8 μm, the thickness of the C-doped TiAlSiN layer 3 is 0.3 μm, and the thickness of the DLC layer 4 is 1 μm .

[0030] The preparation method of the TiAlSiN-DLC composite thin film of the present embodiment is:

[0031] Step 1. Pretreatment of the high-speed steel substrate: Clean the high-speed steel substrate with a metal cleaning agent to remove oil, and then use 400# metallographic sandpaper, 600# metallographic sandpaper, and 1000# metallographic sandpaper on the degreased h...

Embodiment 2

[0039] The process of preparing TiAlSiN-DLC composite film on the surface of Ni-based superalloy GH4037 substrate:

[0040] Such as figure 1 As shown, the TiAlSiN-DLC composite thin film of this embodiment includes a TiAlSiN layer 2 attached to the surface of the metal substrate 1, a C-doped TiAlSiN layer 3 attached to the TiAlSiN layer 2, and a C-doped TiAlSiN layer 3 attached DLC layer 4; the metal substrate is Ni-based superalloy GH4037, the thickness of the TiAlSiN layer 2 is 2 μm, the thickness of the C-doped TiAlSiN layer 3 is 1 μm, and the thickness of the DLC layer 4 is 2.5 μm .

[0041] The preparation method of the TiAlSiN-DLC composite thin film of the present embodiment is:

[0042] Step 1. Pretreatment of Ni-based superalloy GH4037 substrate: Pretreat the surface of Ni-based superalloy GH4037 substrate using the same pretreatment method as step 1 in Example 1;

[0043] Step 2. Activation of the surface of the Ni-based superalloy GH4037 substrate: Place the pret...

Embodiment 3

[0050] Preparation of TiAlSiN-DLC Composite Thin Film on the Surface of Titanium Alloy TC4 Substrate

[0051] Such as figure 1 As shown, the TiAlSiN-DLC composite thin film of this embodiment includes a TiAlSiN layer 2 attached to the surface of the metal substrate 1, a C-doped TiAlSiN layer 3 attached to the TiAlSiN layer 2, and a C-doped TiAlSiN layer 3 attached DLC layer 4; the metal substrate is titanium alloy TC4, the thickness of the TiAlSiN layer 2 is 1.5 μm, the thickness of the C-doped TiAlSiN layer 3 is 0.8 μm, and the thickness of the DLC layer 4 is 2 μm.

[0052] The preparation method of the TiAlSiN-DLC composite thin film of the present embodiment is:

[0053] Step 1, pretreatment of TC4 titanium alloy: adopt the same pretreatment method as step 1 in embodiment 1 to pretreat the surface of TC4 titanium alloy substrate;

[0054] Step 2. Activation of the surface of the TC4 titanium alloy: place the pretreated TC4 titanium alloy in the vacuum chamber of the magne...

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Abstract

The invention discloses a TiAlSiN-DLC composite film, which comprises a TiAlSiN layer attached to the surface of a metal matrix, a C-doped TiAlSiN layer attached to the TiAlSiN layer, and a DLC layer attached to the C-doped TiAlSiN layer. The TiAlSiN layer has thickness of 0.8 micrometer to 2 micrometers, the C-doped TiAlSiN layer has thickness of 0.3 micrometer to 1 micrometer, and the DLC layer has thickness of 1 micrometer to 2.5 micrometers. In the invention, the smooth transition of the metal matrix and the film layers, the internal components among the film layers as well as microstructures has no obvious physical interface, thus realizing interface-free combination between the TiAlSiN layer and the DLC layer, and ensures the composite film good high temperature oxidation resistance as well as self-lubricating, wear resistant and antifriction properties. The film of the invention is expected to greatly extend the service life of workpieces under the complex working conditions of high temperature, and high speed dry friction and wear.

Description

technical field [0001] The invention belongs to the technical field of composite film preparation, and in particular relates to a TiAlSiN-DLC composite film and a preparation method thereof. Background technique [0002] Construction machinery parts are often subjected to harsh working conditions such as high-speed dry friction and high-temperature wear during service. The rapid wear and failure of the workpiece surface caused by the insufficient service performance of the metal matrix material surface is the main reason for the short service life of the workpiece. The material surface modification technology can form a protective film with high hardness and high wear resistance on the surface of the metal matrix material. Compared with the metal matrix material, the protective film has higher hardness and wear resistance, which can significantly improve the service life of the workpiece. performance. For example, after depositing a TiN hard film with a hardness of 20GPa to...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/06C23C14/34
Inventor 王彦峰李争显王宝云杜继红华云峰姬寿长
Owner NORTHWEST INSTITUTE FOR NON-FERROUS METAL RESEARCH