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Silicon piezoresistive pressure sensor core body and production method thereof

A pressure sensor and sensor chip technology, applied in the field of sensors, can solve the problems of inappropriate design of ceramic seat, large thickness of silicone rubber bonding, and inability to produce small ranges, etc., and achieve the effect of light weight, good linear characteristics, and low price

Active Publication Date: 2012-06-27
TIANSHUI HUATIAN SENSOR
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Another object of the present invention is to provide a production method of a silicon piezoresistive pressure sensor core body with small volume, light weight, high output sensitivity and small range, so as to solve the problem of silicone rubber existing in the oil-filled core body of the existing silicon piezoresistive pressure sensor. The bonding thickness is large, the design of the ceramic seat is not suitable for automatic bonding, and there is a lot of oil injection, which makes it impossible to produce small ranges below 10kPa.

Method used

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  • Silicon piezoresistive pressure sensor core body and production method thereof
  • Silicon piezoresistive pressure sensor core body and production method thereof
  • Silicon piezoresistive pressure sensor core body and production method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0062] Example 1: CYX19-10G pressure sensor core

[0063] CYX19-10G pressure sensor core dimensions, unit: mm:

[0064] Outer diameter: φ19 0 -0.05 ;

[0065] Height: 15±0.1;

[0066] Pin spacing: 2.54±0.10;

[0067] Adhesive chip cavity size 4.6±0.1×4.2±0.1;

[0068] Bondable cavity size (φ7.8±0.1)×(0.4±0.05);

[0069] Oil injection chamber height: 1.2mm;

[0070] The diameter of the elastic deformation surface of the corrugated diaphragm is φ18mm

[0071] A. Cleaning:

[0072] Key material: core seat

[0073] The pressure sensor oil injection core seat is made of 316L stainless steel, the lead wire is made of 4J29 or 4J34 iron-cobalt-nickel alloy, the gold plating layer on the surface of the lead wire is more than 99.7% electroplated gold, and only cobalt is used as the hardener. The gold plating process is on the electroplated nickel layer or It is carried out on the electroless nickel plating layer, the thickness of the gold plating layer is ≥0.3μm, and the ...

Embodiment 2

[0133] Example 2: CYX19-5G pressure sensor core

[0134] CYX19-5G pressure sensor core dimensions, unit: mm:

[0135] Outer diameter: φ19 0 -0.05 ;

[0136] Height: 15±0.1;

[0137] Pin spacing: 2.54±0.10;

[0138] Adhesive chip cavity size (4.6±0.1)×(4.2±0.1);

[0139] Bondable cavity size (φ7.8±0.1)×(0.4±0.05);

[0140] Oil injection cavity height: 0.8;

[0141] The diameter of the elastic deformation surface of the corrugated diaphragm is φ18.

[0142] (1) Die bonding

[0143] The cavity size of CYX19-5G core seat bonding area is (4.6mm±0.1mm)×(4.2mm±0.1mm), and the cavity depth is 0.8mm±0.1 mm. The chip height is 1.3mm. The chip size of the pressure sensor is relatively thick, and the problem of insufficient height is solved by using a method of dimples at the sticking position of the core seat.

[0144] The thickness of the chip is 1300μm, which is used as a benchmark for theoretical analysis. The depth of CYX19-5G core seat cavity is 800μm±100μm, and the ...

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Abstract

The invention aims at providing a silicon piezoresistive pressure sensor core body and a production method of the silicon piezoresistive pressure sensor core body for solving the problems that in the existing silicon piezoresistive pressure sensor oil core body, the silicon rubber sticking thickness is great, the ceramic seat design does not adapt to the automatic bonding, the oil injection quantity is large, and small ranges less than 10kPa cannot be produced. The silicon piezoresistive pressure sensor core body comprises a core body seat body, a glass insulator, vent holes, a lead wire and an oil injection cavity, wherein the center of the core body seat body is provided with a concave pit, a chip ceramic seat is arranged in the oil injection cavity, a sensor chip is arranged on the chip ceramic seat, a corrugated diaphragm is arranged above the sensor chip, and a welding ring is arranged on the corrugated diaphragm. The production method of the sensor core body adopts the steps of cleaning, chip sticking, bonding, corrugated diaphragm welding, vacuum oil injection, high-temperature storage, fatigue test, printing, automatic temperature compensation and test. The silicon piezoresistive pressure sensor core body has the advantages that because the size is small, the weight is light, and the output sensitivity is high.

Description

technical field [0001] The invention belongs to the field of sensors, in particular to a silicon piezoresistive pressure sensor core and a production method thereof. Background technique [0002] At present, the silicon piezoresistive pressure sensor oil injection core produced by the general process adopts the relatively popular silicon piezoresistive pressure sensor production process. 25μm~50μm, the effective pressure-sensing surface diameter of the corrugated diaphragm is φ16mm. With such a structure, the bonding thickness of silicone rubber is large; the design of the ceramic seat is not suitable for automatic bonding; the bonding arch wire is high; the oil injection cavity is large, the amount of silicone oil injected is large, and the silicone oil shrinks and expands due to temperature changes. Therefore, only 35kPa~100MPa silicon piezoresistive pressure sensor oil-filled cores can be produced, which cannot meet the packaging requirements of 10kPa and below small ran...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L9/06G01L27/00
Inventor 杨熹任忠原李存德徐冬梅姚子龙马长宝王玉熬
Owner TIANSHUI HUATIAN SENSOR
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