Multi-section-type FP (FabryPerot) cavity single wavelength laser based on deeply etched grooves

A deep etching, laser technology, applied in lasers, laser parts, semiconductor lasers, etc., can solve the problem of device wavelength deviation from the design wavelength, etc., and achieve the effect of narrow laser line width, less energy loss, and small manufacturing error.

Active Publication Date: 2012-07-04
深圳市迅特通信技术股份有限公司 +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, there are still two problems with this structure: 1. Most of the energy in the laser cavity is concentrated in the quantum well layer, and the shallow etching groove is just etched to the quantum well layer. When the light passes through this interface, there will be A large part of the energy hits the acute angle at the bottom

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  • Multi-section-type FP (FabryPerot) cavity single wavelength laser based on deeply etched grooves
  • Multi-section-type FP (FabryPerot) cavity single wavelength laser based on deeply etched grooves
  • Multi-section-type FP (FabryPerot) cavity single wavelength laser based on deeply etched grooves

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Embodiment Construction

[0028] Figure 4 It is an embodiment of the present invention, and its structure includes a laser waveguide 11, a first deeply etched reflection surface 21, a second deeply etched reflection surface 22 and an array of deeply etched grooves 31 distributed therebetween.

[0029] The deep etched groove array 31, the first deep etched reflective surface 21 and the second deep etched reflective surface 22 are the key structures of the present invention, wherein the deep etched groove array 31 includes the first deep etched groove 301, the second deep etched groove 302 and the 0~4 deep etched grooves between them. The above structures are all fabricated by the ICP deep etching process, which requires smooth and vertical sidewalls and an etching depth exceeding the quantum well layer 5 to ensure sufficient feedback and to ensure that most of the energy in the cavity propagates in the direction of the horizontal and resonant cavity. When the light passes through the side of the deep ...

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Abstract

The invention discloses a multi-section-type (FabryPerot) cavity single wavelength laser based on deeply etched grooves. The laser disclosed by the invention is structurally characterized by at least comprising a laser waveguide, a first deeply etched reflecting surface and a second deeply etched reflecting surface which are respectively positioned at two ends of the laser waveguide, and a deeplyetched groove array arranged between the first deeply etched reflecting surface and the second deeply etched reflecting surface, wherein the deeply etched groove array is composed of 2-6 deeply etched grooves; the laser is manufactured on a semiconductor epitaxial wafer, and respectively comprises a lower cladding layer, a quantum well layer, an upper cladding layer and certain auxiliary layers among the lower cladding layer, the quantum well layer, the upper cladding layer layers from bottom to top; and the laser waveguide is divided into a plurality of sections of independent waveguides by the deeply etched groove array, the first deeply etched reflecting surface and the second deeply etched reflecting surface, each section of waveguide is covered with an electrode, and each electrode is respectively injected with a current so as to control the laser wavelength and power. Compared with the background technology, the laser disclosed by the invention has the advantages that the production process is simpler and cheaper due to only once epitaxial growth, the manufacturing error is smaller, the energy consumption for the apparatus operation is less, and the laser line width is narrower.

Description

technical field [0001] The invention relates to a multi-section FP cavity single-wavelength laser, in particular to a multi-section FP cavity single-wavelength laser based on deep etched grooves. Background technique [0002] In the 1970s, major breakthroughs were made in optical fibers and lasers. After decades of efforts by R&D personnel from various countries, optical fiber communication systems have been updated many times. Especially since the early 1990s, as human society has entered an era of explosive and rapid growth in the amount of information exchange, optical fiber communication technology has been used in the field of communication with its huge broadband potential and unparalleled transmission performance. Especially in the long-distance large-capacity communication occupies an irreplaceable important position. [0003] Wavelength-division multiplexing (WDM) is a technology commonly used in large-capacity optical fiber communication networks. Considering the...

Claims

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Application Information

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IPC IPC(8): H01S5/125H01S5/34
Inventor 王磊王寅杨友光何建军
Owner 深圳市迅特通信技术股份有限公司
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