Method for forming crystalline silicon film and plasma CVD device
A film-forming method and plasma technology, which are applied in the fields of plasma, semiconductor/solid-state device manufacturing, gaseous chemical plating, etc., can solve the problems of decreased crystallinity of crystalline silicon film, deterioration of film quality, etc., and reduce thermal budget. Effect
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[0044] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. figure 1 It is a cross-sectional view schematically showing a schematic configuration of a plasma CVD apparatus 100 that can be used in the method for producing a crystalline silicon film of the present invention.
[0045] The plasma CVD apparatus 100 is configured as an RLSA microwave plasma processing apparatus that introduces microwaves into The plasma is generated inside the processing container, whereby microwave-excited plasma with high density and low electron temperature can be generated. In the plasma CVD apparatus 100, it is possible to use a plasma density of 1×10 10 ~5×10 12 / cm 3 And a plasma with a low electron temperature of 0.7-2eV is used for processing. Accordingly, the plasma CVD apparatus 100 can be applied to a film formation process of forming a polysilicon film which is a crystalline silicon film by plasma CVD in the manufacturing proc...
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