Multilayer thin film OTFT (organic thin film transistor) formaldehyde gas sensor and preparation method thereof

A technology of formaldehyde sensor and multi-layer thin film, which is applied in the direction of coating, instrument, scientific instrument, etc., can solve the problems of poor stability and repeatability, slow response time, poor selectivity, etc., achieve low cost, improve device performance, and small size Effect

Inactive Publication Date: 2012-08-15
UNIV OF ELECTRONIC SCI & TECH OF CHINA
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Problems solved by technology

[0010] In view of the above prior art, the technical problem to be solved by the present invention is: the existing

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  • Multilayer thin film OTFT (organic thin film transistor) formaldehyde gas sensor and preparation method thereof
  • Multilayer thin film OTFT (organic thin film transistor) formaldehyde gas sensor and preparation method thereof
  • Multilayer thin film OTFT (organic thin film transistor) formaldehyde gas sensor and preparation method thereof

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[0040] The present invention will be further described below in conjunction with the drawings and specific implementations.

[0041] Multi-layer thin film OTFT formaldehyde gas sensor prepared by MEMS technology and thin film, combined figure 1 As shown, an n-type silicon substrate is used to prepare an insulating layer of silicon dioxide by a thermal oxidation method, gold is used as an electrode, and titanium is used as a transition layer. The electrode layer is located on the transition layer. The purpose is to enhance adhesion. Source a, The three-terminal electrodes of the drain b and the gate c respectively have outer leads for testing. The invention utilizes the characteristics of the OTFT sensor structure itself, and directly uses the conductive glue sintering method to draw the grid on the silicon wafer substrate, which greatly simplifies the preparation process and improves the performance of the device.

[0042] Combine figure 2 Shown is the graphic design of the source...

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Abstract

The invention discloses a multilayer thin film OTFT (organic thin film transistor) formaldehyde gas sensor and a preparation method thereof. The sensor is in a bottom-grid bottom-contact device structure, and is provided with a source a, a drain b and a grid c, wherein a trench between the source and the drain is designed as an interdigital structure; the source and the drain are respectively a gold/titanium double-layer film, the gold material is used as an electrode layer, and the titanium material is used as a transition layer; and a sensitive thin film, which is an organic semiconductor material-inorganic nano oxide multilayer thin film, is arranged between the source and the drain. The invention combines the organic semiconductor material with the inorganic nano oxide, and adopts a multilayer thin film mode to prepare the sensitive thin film, thereby greatly enhancing the sensitivity and response speed of the sensor. On the premise of implementing formaldehyde gas detection, the invention breaks through the limitation in material selection in the traditional OTFT device, and adopts the MEMS technology to prepare the OTFT device. The invention has the advantages of small size, low cost and the like, can be integrated into an array, and opens up a new way for preparation and application of the OTFT formaldehyde sensor.

Description

technical field [0001] The invention relates to the fields of microelectromechanical system gas sensors and organic / inorganic nanocomposite materials, in particular to a multilayer thin-film OTFT formaldehyde gas sensor based on an organic semiconductor material-inorganic nanometer metal oxide and a manufacturing method thereof. Background technique [0002] Formaldehyde is an organic volatile compound that is very harmful to human health. The United States Environmental Protection Agency EPA announced formaldehyde as a substance that causes acute respiratory diseases as early as 1998. When people inhale formaldehyde, symptoms such as headache, fatigue, cough, and asthma will occur; the World Health Organization lists it as "possibly harmful to humans." carcinogen". Therefore, the detection of indoor air pollutants such as formaldehyde has become one of the research hotspots and important topics in the scientific community. In recent years, there have been many studies on ...

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Application Information

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IPC IPC(8): G01N27/414B81C1/00
Inventor 太惠玲蒋亚东李娴但文超
Owner UNIV OF ELECTRONIC SCI & TECH OF CHINA
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