Piezoelectrically actuated micro-mixer, manufacturing method and control method of piezoelectrically actuated micro-mixer

Abstract

The invention discloses a piezoelectrically actuated micro-mixer, a manufacturing method and a control method of the piezoelectrically actuated micro-mixer, belonging to the technical field of a micro-mixer. With the adoption of the micro-mixer, a micro-fluid drive unit (namely a piezoelectric pump) and a micro-mixing unit (namely a mixing runner) are integrated into a whole via an overall PDMS (polydimethylsiloxan) substrate; a single chip piezoelectric vibrator and a one-way valve block are encapsulated together with the PDMS substrate to form the piezoelectric pump; a glass base plate is encapsulated together with the PDMS substrate to form the mixing runner; and the piezoelectric vibrator is stimulated by adopting different voltages, frequencies, different waveforms and phase staggered drive electric signals so as to achieve high-frequency pulsating displacement mixing of the micro-fluid in a micro-mixing runner. With the adoption of the piezoelectrically actuated micro-mixer, the defects of low mixing efficiency, long time and the like caused by that the micro-fluid is mixed by laminar diffusion under a micro-scale are effectively overcome, so that efficient turbulent mixing is realized. The piezoelectrically actuated micro-mixer disclosed by the invention has the advantages of being simple in manufacturing method, low in cost, high in mixing efficiency, short in time, small in volume and easy in integration, and capability of widely applying to the fields such as analytical chemistry, micro-chemical system, environment monitoring, life science and the like.

Description

technical field [0001] The invention belongs to the technical field of microfluid mixing, and in particular relates to a piezoelectric-driven micromixer, a manufacturing method and a control method thereof. Background technique [0002] As an important part of the microfluidic system, the micro-mixer is used to realize the full mixing of different reactants under micro-scale conditions. Application prospects. [0003] It is difficult to achieve rapid and effective mixing of microfluidics at the microscale, because the characteristic size of the microfluidic system belongs to the micron level, the Reynolds number is small (Re=0.1~100), the fluid maintains a laminar flow state, and the mixing completely depends on molecular diffusion It takes a long distance and time to mix evenly. Especially when dealing with reagents containing large molecules, achieving complete mixing becomes more difficult. [0004] Many researchers disrupt the flow field by changing the structure of t...

AI Technical Summary

Problems solved by technology

Disadvantages: difficult processing, low mixing efficiency, and poor mixing controllability; active micro-mixers require external energy to induce mixing, including: micro-stirring, pressure disturbance, acoustic wave disturbance, electrohydrodynamic and magnetohydrodynamic drive, etc.

But there are still the following disadvantages: the overall structure is complex, in addition to the surface acoustic wave generator, it still needs to be driven by a syringe pump; the volume is large, it is not easy to integrate and miniaturize; the production cost is high; there is working noise, etc.

However, there are the following disadvantages: sensitive to output back pressure; micropump has no cut-off; in the early stage of mixing, debugging operations such as filling the pump are required; mixing capacity and mixing mode are limited; mixing controllability is not high, etc.

Therefore, a large number of problems remain to be solved in fluid mixing at the microscale.

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