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Inorganic salt etching solution used for electrochemically etching highly fine lines

A technology of inorganic salt and etching solution, applied in the field of electronic industry application, can solve the problems such as the inability to meet the requirements of high precision, and achieve the effects of stable etching speed, simple preparation method and low production cost

Inactive Publication Date: 2012-09-26
NANJING UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

When the wire width is about ≤75mm, the traditional ferric chloride chemical etching method can no longer meet the high precision requirements

Method used

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  • Inorganic salt etching solution used for electrochemically etching highly fine lines
  • Inorganic salt etching solution used for electrochemically etching highly fine lines
  • Inorganic salt etching solution used for electrochemically etching highly fine lines

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0028] A kind of inorganic salt etching solution for electrochemically etching high-precision circuits, wherein the concentration of potassium chloride in the inorganic salt etching solution is 40 g / L, the concentration of potassium nitrite is 40 g / L, and the concentration of potassium phosphate is 40 g / L g / L, the concentration of complexing agent HEDP is 100 g / L, and the concentration of methanol is 100 g / L.

[0029] Such as figure 1 As shown, the electrochemical etching device consists of electrolytic cell (1), cathode (2), current distribution guide plate (3), anode (that is, etched circuit board) (4), electrolyte circulation pipeline and electrolyte circulation pump And so on. Anodic product Cu during etching 2+ Dissolved in the electrolyte, the cathode copper ions are reduced and deposited on the cathode from the solution. Electrolyte can always maintain the best state of stability.

[0030] The above-mentioned inorganic salt etching solution is combined with an elect...

Embodiment 2

[0033]A kind of inorganic salt etching solution for electrochemically etching high-precision circuits, wherein the concentration of potassium chloride in the inorganic salt etching solution is 40 g / L, the concentration of potassium nitrite is 40 g / L, and the concentration of potassium phosphate is 40 g / L g / L, the concentration of complexing agent disodium EDTA is 100 g / L, and the concentration of ethanol is 100 g / L.

[0034] The above-mentioned inorganic salt etching solution is combined with an electrochemical etching device. The copper foil of the printed circuit board is used as the anode, and the graphite sheet is used as the cathode. The area ratio of the cathode and the anode is 10:1. At 30°C, the printed circuit board sample was etched by mechanical stirring etching, and the copper foil engraving time and potential value had a linear relationship.

[0035] Under the potential of 10V, the time required to carve through the arc-shaped printed circuit board is 40 s, which ...

Embodiment 3

[0037] A kind of inorganic salt etching solution for electrochemical etching, wherein the concentration of potassium chloride in the inorganic salt etching solution is 40 g / L, the concentration of potassium nitrite is 40 g / L, and the concentration of potassium phosphate is 40 g / L , The concentration of the complexing agent sodium citrate is 100 g / L, and the concentration of acetone is 100 g / L.

[0038] The above-mentioned inorganic salt etching solution is combined with an electrochemical etching device. The copper foil of the printed circuit board is used as the anode, and the stainless steel sheet is used as the cathode. The area ratio of the cathode and the anode is 10:1. At 10°C, the printed circuit board sample is etched by spray etching, and the copper foil engraving time has a linear relationship with the potential value. After electrochemical etching in this inorganic salt etching solution, the appearance of the circuit board is neat and clean, the line spacing of 0.2m...

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Abstract

The invention discloses an inorganic salt etching solution used for electrochemically etching highly fine lines. The inorganic salt etching solution is prepared from the following gcomponents: potassium chloride, potassium nitrite, potassium phosphate, coordination agent, additive and water. The concentration of each component of the inorganic salt etching solution is accurate, the accuracy of the copper foil of a printed-circuit board can be controlled below 10 mum by an electrochemically etching method, the etching accuracy is high, the etching speed is stable, the etching is uniform, the etching solution is easy to regenerate and has small pollution, a preparation method of the inorganic salt etching solution is simple, and the inorganic salt etching solution has low production cost, a wide application scope and good economic and social benefits.

Description

technical field [0001] The invention relates to an etching solution formula for electrochemically etching copper foil to produce high-precision circuits, in particular to an inorganic salt etching solution having the advantages of stable etching speed, uniform etching, easy regeneration and less pollution, which belongs to the application in the electronics industry field. Background technique [0002] At present, the design and connection of all electronic instrument circuits are mostly based on printed circuit boards. With the advancement of technology in the electronics industry, printed boards are developing in the direction of multi-layer and densification, and the etching solution preparation method has gradually changed from the previous extensive Type to professional development. Etching is a necessary process in the production of printed circuit boards. The copper clad laminate etching method has become a common method for domestic circuit board production due ...

Claims

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Application Information

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IPC IPC(8): C23F1/14
Inventor 赵健伟贺园园
Owner NANJING UNIV
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