Method and system for double-tube scanner linkage tracking type atomic force microscopic detection

A technology of atomic force microscopy and detection methods, which is applied in the direction of scanning probe microscopy, scanning probe technology, instruments, etc., can solve the problems that the scanning and detection of samples with large size and weight cannot be realized, so as to avoid false signals and AFM image distortion, the effect of avoiding image distortion

Inactive Publication Date: 2013-12-04
ZHEJIANG UNIV
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Problems solved by technology

These AFM instruments can better realize small-scale scanning imaging of micro-nano samples with small mass and small size, but cannot realize scanning detection of samples with large size and weight, and it is obvious that samples with large size and weight account for most

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  • Method and system for double-tube scanner linkage tracking type atomic force microscopic detection
  • Method and system for double-tube scanner linkage tracking type atomic force microscopic detection
  • Method and system for double-tube scanner linkage tracking type atomic force microscopic detection

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Embodiment Construction

[0016] Double-tube scanner linkage tracking atomic force microscopy detection method: fix the sample on the open sample stage, scan the microprobe with the double-tube scanner and track the beam in linkage, and introduce a scanning along with the double-tube scanner. Linkage lens, the XY scanning movement amount is consistent with the microprobe movement amount, the microprobe is always located on the focal plane of the linkage lens, and is emitted from the laser and passes through the linkage during the linkage scanning of the dual-tube scanner, microprobe, and tracking lens. The laser spot formed by the lens can always irradiate obliquely and focus on the microprobe, so as to realize beam tracking; the beam reflected from the microprobe is irradiated vertically to the photoelectric position detector, due to the Z feedback movement of the microprobe The direction coincides with the optical axis of the reflected light beam, and the position of the center of gravity of the refle...

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Abstract

The invention discloses a method and system for double-tube scanner linkage tracking type atomic force microscopic detection. The atomic force microscopic detection and the scanning imaging of the micro / nano-structure of a sample are realized by adopting the method comprising the following steps of: fixing the sample, scanning a microprobe by using a double-tube scanner, and tracking a light beam in a linkage way. The system comprises a double-tube scanner linkage tracking type AFM (Atomic Force Microscope) detection head and a scanning imaging and feedback control system, wherein the double-tube scanner linkage tracking type AFM detection head comprises the double-tube scanner, a probe seat, the microprobe, an L-shaped structure, a linkage lens, a laser, a photoelectric position detector, the sample, a sample platform, and the like, and the scanning imaging and feedback control system comprises a pre-amplifier, a scanning and feedback control unit, a computer, and the like. The invention has the advantages that the dimension and the weight of the sample are not limited, a light path system linked with the double-tube scanner effectively realizes the tracking of the light beam during scanning; a reflected light path is consistent to the motion direction of Z feedback so that spurious signal and AFM image fault which are generated by feedback are prevented, and image distortion generated by coupling is eliminated by the mutually orthometric halved double-tube scanner in a double-layer structure with an upper layer and a lower layer.

Description

technical field [0001] The invention relates to a double-tube scanner linkage tracking type atomic force microscopic detection method and system. Background technique [0002] In recent years, one of the most important characteristics of modern science and technology, industry, agriculture, and national defense has been the rapid development and extension in the direction of larger capacity, faster speed, and smaller scale. Human society has truly entered the information age And the micro-nano era. Micro-nano technology is the cutting-edge technology that developed rapidly at the end of the 20th century and the beginning of the 21st century. All major countries in the world regard micro-nano technology as a priority development field in the new century. Micro-nano detection and micro-imaging technologies such as optical microscope, scanning electron microscope (SEM), transmission electron microscope (TEM) and scanning probe microscope (SPM) are the important basis for the d...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01Q60/24
Inventor 张冬仙丑若帆章海军刘明月
Owner ZHEJIANG UNIV
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