Boron nitride-boron carbide-graphite composite heating element used for high temperature electric heating

A boron carbide and boron nitride technology, which is applied in the field of boron nitride (BN)-boron carbide (B4C)-graphite composite heating element, can solve the problem that the surface coating requirements of the ultra-high temperature heating element and the thermal expansion coefficient of the surface coating cannot be satisfied. Non-uniformity, unstable heating element resistivity, etc., to achieve good chemical stability, ensure electrical conductivity, and good high-temperature chemical stability

Active Publication Date: 2014-06-04
北京博宇半导体工艺器皿技术有限公司 +2
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

When the temperature is higher than 1600°C, the quartz coating will undergo a carbothermal reduction reaction with the graphite material, and gaseous SiO will be volatilized or SiC and other substances will be generated, making the thermal expansion coefficient of the surface coating uneven and the resistivity of the heating element unstable. And it will lead to a decrease in the density of the coating
When the temperature is higher than 1800°C, the quartz coating melts, so the quartz coating cannot meet the requirements of the super high temperature heating element surface coating
Therefore, the existing graphite surface coating and modification technology cannot meet the needs of graphite heating elements used at 2300°C-2800°C. The main problem is that the graphite coating will interact with the oxides in the surface coating at high temperatures. reaction, leading to coating failure

Method used

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  • Boron nitride-boron carbide-graphite composite heating element used for high temperature electric heating

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0030] A graphite block with a size of 100mm×20mm×10mm at the hot end is prepared, and its surface is polished. The polished graphite was placed in a high-temperature vacuum furnace, heated to 2200° C., kept at a temperature of 60 hours, and subjected to high-temperature pretreatment to obtain graphite matrix 1 .

[0031] Place the graphite substrate after high temperature pretreatment in a high temperature atmosphere reaction furnace, and put C 3 h 6 Gas and BCl 3 The gas is mixed at a molar ratio of 1:12 and then passed into the high-temperature reaction furnace, and the gas flow rate is controlled at 1L / min. The temperature of the chemical vapor deposition is controlled at 2200° C., and the deposition time is 20 hours. After a chemical vapor phase reaction, a layer of boron carbide (B) with a thickness of 0.5 mm is formed on the surface of the graphite heating element. 4 C) Middle layer 2.

[0032] will be deposited with boron carbide (B 4 C) The graphite matrix of th...

Embodiment 2

[0036] A graphite block with a hot end size of 30mm×10mm×4mm was prepared, and its surface was polished. The polished graphite was placed in a high-temperature vacuum furnace, heated to 2300° C., kept for 100 hours, and subjected to high-temperature pretreatment to obtain graphite matrix 1 .

[0037] Place the graphite substrate after high temperature pretreatment in a high temperature atmosphere reaction furnace, and put C 3 h 6 Gas and BCl 3 The gas is mixed at a molar ratio of 1:10 and then passed into the high-temperature reaction furnace, and the gas flow rate is controlled at 5L / min. The temperature of the chemical vapor deposition is controlled at 2300° C., and the deposition time is 5 hours. After a chemical vapor phase reaction, a layer of boron carbide (B) with a thickness of 0.3 mm is formed on the surface of the graphite heating element. 4 C) Middle layer 2.

[0038] will be deposited with boron carbide (B 4 C) The graphite matrix of the middle layer is place...

Embodiment 3

[0042] A graphite block with a hot end size of 50mm×5mm×5mm was prepared, and its surface was polished. The polished graphite was placed in a high-temperature vacuum furnace, heated to 2000° C., kept for 80 hours, and subjected to high-temperature pretreatment to obtain graphite matrix 1 .

[0043] Place the graphite substrate after high temperature pretreatment in a high temperature atmosphere reaction furnace, and put C 3 h 6 Gas and BCl 3 The gas is mixed at a molar ratio of 1:15 and then passed into the high-temperature reaction furnace, and the gas flow rate is controlled at 8L / min. The temperature of the chemical vapor deposition is controlled at 2200° C., and the deposition time is 5 hours. After a chemical vapor phase reaction, a layer of boron carbide (B) with a thickness of 0.4 mm is formed on the surface of the graphite heating element. 4 C) Middle layer 2.

[0044] will be deposited with boron carbide (B 4 C) The graphite matrix of the middle layer is placed ...

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Abstract

The invention discloses a boron nitride-boron carbide-graphite composite heating element used for high temperature electric heating, which is composed of a graphite matrix, a boron carbide intermediate layer coated on the outer surface of the graphite matrix and a boron nitride surface layer coated outside the boron carbide intermediate layer. The profile of the graphite matrix can be designed and treated according to the requirements of the electric heating equipments, the graphite matrix requires high temperature pretreatment; the boron carbide intermediate layer is coated on the surface of the graphite matrix, the thickness is 0.02-1mm, and the boron carbide intermediate layer can be prepared by chemical vapor deposition; the boron nitride surface layer is coated outside the boron carbide intermediate layer, and the thickness is 0.1-10mm, and the boron nitride surface layer is prepared by chemical vapor deposition. The boron nitride-boron carbide-graphite composite heating element can realize the electric heating requirements under the temperature of 2000-2800 DEG C, and has the advantages of stable electrical resistivity of the heating element, long usage life, accurate temperature control and less high temperature environmental pollution.

Description

technical field [0001] The invention relates to a boron nitride (BN)-boron carbide (BN) for high temperature electric heating 4 C) - graphite composite heating element, which belongs to the technical field of high temperature heating elements. Background technique [0002] In recent years, with the development of high-temperature materials, especially the development of ultra-high-temperature ceramics and Si-B-C-O-N materials, materials need to be synthesized and sintered at higher temperatures (2000°C-2800°C). Characterization and testing of performance and service performance, such as differential thermal gravimetric research of precursors, testing of thermal expansion coefficient and thermal conductivity, testing of high-temperature mechanical properties of materials, etc. The preparation and testing of these materials require equipment that can accurately control A heating device with a uniform temperature field and no gas pollution. At present, the heating methods of t...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C04B35/66C04B41/89
Inventor 何军舫房明浩刘艳改黄朝晖
Owner 北京博宇半导体工艺器皿技术有限公司
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