Large polycrystalline silicon crucible, coating slurry thereof and preparation method of coating
A crucible coating, polycrystalline silicon technology, applied in the direction of polycrystalline material growth, chemical instruments and methods, crystal growth, etc., can solve the problems of sticking to the pan, large amount of filler, high labor intensity, etc.
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[0030] In order to enable those skilled in the art to better understand the solution of the present invention, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0031] Please refer to figure 1 , figure 2 , figure 1 It is a sectional view of the large polysilicon crucible provided by the present invention; figure 2 for figure 1 Partial enlarged schematic diagram of part A in the middle.
[0032] In a specific embodiment, the large polysilicon crucible 1 provided by the present invention includes a crucible body 1-1 and a crucible coating 1-2 attached to the crucible body, and the sprayed slurry of the crucible coating 1-2 is formed by nitriding Made of silicon, water and silica sol.
[0033] Among them, silicon nitride is in the form of powder, which is the main component of the coating; water is treated pure water with almost no impurities, and the resistivity is above 10 megohm; sil...
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