Ferroelectric film with high energy storage density, and preparation method thereof
A high energy storage density, ferroelectric film technology, applied in the field of capacitor manufacturing, can solve the problems of capacitor energy storage density and large size can not meet the urgent needs of high energy storage capacitors, etc., to achieve the effect of excellent dielectric
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Embodiment 1
[0031] According to 0.1Bi(Ni 1 / 2 Ti 1 / 2 )O 3 -0.9PbTiO 3 Chemical composition, weighing raw materials of lead acetate trihydrate, titanium isopropoxide, bismuth nitrate pentahydrate and nickel acetate tetrahydrate, as well as glacial acetic acid, deionized water, acetylacetone and formamide, in order to compensate for the volatilization of lead and bismuth during heat treatment , lead acetate trihydrate and bismuth nitrate pentahydrate are both in excess of 5%, and a bismuth nickel titanate-lead titanate precursor solution is prepared with a concentration of 0.2-0.4mol / L.
[0032] After standing and aging the prepared precursor solution for 10 days to form a sol, the Pt / Ti / SiO 2 Utilize spin-coating method to prepare film material on / Si substrate, the rotating speed is 5000 rev / mins, and the time is 30 seconds; o C drying 1min, then put into heat treatment furnace at 500 o C pyrolysis for 5min; after repeating the process of "spin-coating-drying-pyrolysis" for 10 times, ...
Embodiment 2
[0036] According to 0.2Bi(Ni 1 / 2 Ti 1 / 2 )O 3 -0.8PbTiO 3 Chemical composition, weighing raw materials of lead acetate trihydrate, titanium isopropoxide, bismuth nitrate pentahydrate and nickel acetate tetrahydrate, as well as glacial acetic acid, deionized water, acetylacetone and formamide, in order to compensate for the volatilization of lead and bismuth during heat treatment , lead acetate trihydrate and bismuth nitrate pentahydrate are both in excess of 5%, and a bismuth nickel titanate-lead titanate precursor solution is prepared with a concentration of 0.2-0.3mol / L.
[0037]After standing and aging the prepared precursor solution for 3 days to form a sol, the Pt / Ti / SiO 2 Utilize spin-coating method to prepare film material on / Si substrate, the rotating speed is 5000 rev / mins, and the time is 30 seconds; o C drying 1min, then put into heat treatment furnace at 500 o C pyrolysis for 5min; after repeating the process of "spin-coating-drying-pyrolysis" for 10 times, fi...
Embodiment 3
[0041] According to 0.3Bi(Ni 1 / 2 Ti 1 / 2 )O 3 -0.7PbTiO 3 Chemical composition, weighing raw materials of lead acetate trihydrate, titanium isopropoxide, bismuth nitrate pentahydrate and nickel acetate tetrahydrate, as well as glacial acetic acid, deionized water, acetylacetone and formamide, in order to compensate for the volatilization of lead and bismuth during heat treatment , lead acetate trihydrate and bismuth nitrate pentahydrate are both in excess of 5%, and a bismuth nickel titanate-lead titanate precursor solution is prepared with a concentration of 0.2-0.3mol / L.
[0042] After standing and aging the prepared precursor solution for 5 days to form a sol, the Pt / Ti / SiO 2 Utilize spin-coating method to prepare film material on / Si substrate, the rotating speed is 5000 rev / mins, and the time is 30 seconds; o C drying 1min, then put into heat treatment furnace at 500 o C pyrolysis for 5min; after repeating the process of "spin-coating-drying-pyrolysis" for 10 times, f...
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