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Solar selective absorption film system with adjustable color and preparation method thereof

A selective and solar technology, applied in the field of heat absorbing film of solar collectors and light-to-heat conversion materials, can solve the problems of unadjustable appearance color, difficult to control the valence state of compounds, poor light-to-heat conversion performance, etc., to achieve good resistance Erosion resistance, service life improvement, hardness and wear resistance effect

Active Publication Date: 2014-08-13
上海瀚川企业管理咨询有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0009] TiN disclosed in Chinese Patent Publication No. CN101240944A and CN201196495Y x o y The film is coated with silicon dioxide SiO 2 After the anti-reflective film, the absorption rate can reach 96%, and the emissivity is lower than 4%, but its appearance color cannot be adjusted; and the patent publication number CN1594644A mentions that the color difference of various valence compounds of Ti can be used to adjust the color of the film. color, but on the one hand its disclosed TiN of various colors x o y The highest absorption rate in the film is only 94%, and the lowest emissivity is as high as 7%. The light-to-heat conversion performance is not good. On the other hand, the compound valence state of Ti is difficult to control in the sputtering process, so it is not suitable for industrial production.

Method used

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  • Solar selective absorption film system with adjustable color and preparation method thereof
  • Solar selective absorption film system with adjustable color and preparation method thereof
  • Solar selective absorption film system with adjustable color and preparation method thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0048] A dark blue solar selective absorption film system 1 and a preparation method thereof.

[0049] The thickness of each film layer of this absorption film system 1 is composed as follows:

[0050] Cu foil substrate / TiN x o y Thin film (69nm) / Si 3 N 4 Thin film (58nm) / SiO 2 Thin film (54nm).

[0051] Taking the process parameters of the magnetron sputtering equipment used in this embodiment as an example, the preparation method of this absorbing film system is as follows:

[0052] First, using magnetron sputtering method, using Cu foil as the substrate, using TiN sintered according to the preset atomic ratio of Ti, N and O. x o y The ceramic is used as the target material, and a layer of TiN is plated on the Cu film x o y Thin films were grown to a thickness of 69nm by controlling the reactive sputtering time. The atomic ratio of the three elements in the target used in this embodiment is Ti:N:O=1:0.8:1.3, the sputtering power is 1kW, the intermediate frequency f...

Embodiment 2

[0059] A dark green solar selective absorption film system 2 and a preparation method thereof.

[0060] The thickness of each film layer of this absorption film system 2 is composed as follows:

[0061] Ag-coated Cu foil substrate / TiN x o y Thin film (77nm) / TiO 2 Thin film (5nm) / Si 3 N 4 Thin film (63nm) / SiO 2 Thin film (51nm).

[0062] Taking the process parameters of the magnetron sputtering equipment used in this embodiment as an example, the preparation method of this absorbing film system is as follows:

[0063] First, using the magnetron sputtering method, using metal Ag as the target material, a layer of 50nm infrared highly reflective Ag film is coated on the Cu foil substrate;

[0064] Then, the Cu foil substrate coated with Ag film was used as the substrate, the TiN ceramic was used as the target material, Ar gas was used as the sputtering gas, and O gas was introduced as the reaction gas to prepare TiN x o y film. Adjust TiN by adjusting the sputtering pow...

Embodiment 3

[0072] A light yellow solar selective absorption film system 3 and its preparation method.

[0073] The thickness of each film layer of this absorption film system 3 is composed as follows:

[0074] Cu foil substrate / TiN x o y Thin film (97nm) / TiO 2 Thin film (21nm) / Si 3 N 4 Thin film (36nm) / SiO 2 Thin film (49nm).

[0075] Taking the process parameters of the magnetron sputtering equipment used in this embodiment as an example, the preparation method of this absorbing film system is as follows:

[0076] First, using the magnetron sputtering method, using Cu foil as the substrate, metal Ti as the target material, Ar gas as the sputtering gas, and N gas and O gas as the reaction gas to prepare TiN with gradually changing composition. x o y film. Preparation of TiN with gradually changing composition by controlling the flow ratio or pressure ratio of Ar gas, N gas and O gas over time x o y Thin film, by controlling the reactive sputtering time to grow the film thickne...

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Abstract

The invention discloses a solar selective absorption film system with an adjustable color and a preparation method thereof. The solar selective absorption film system with the adjustable color comprises a titanium oxynitride film, a titanium dioxide film, a silicon nitride film and a silicon dioxide film, which are plated on a metal substrate from bottom to top. According to the invention, the absorption rate of the absorption film system to solar energy is more than 96 % and the transmission rate is less than 4 %; and the solar selective absorption film system with the adjustable color, disclosed by the invention, has the advantages of high photo-thermal conversion efficiency, high heat collecting efficiency and adjustable color. According to the invention, the appearance color of the absorption film system is adjusted on the premise that good absorption rate and transmission rate are kept; through a plenty of appearance colors, integration between solar heat collecting products and buildings can be preferably achieved; and beautiful, diversified and personalized needs of photo-thermal products such as solar water heaters and solar air conditioners are satisfied. The solar selective absorption film system with the adjustable color, disclosed by the invention, can be directly plated on a large-area substrate through an industrial magnetron sputtering preparation method in a continuous way and is easy to realize large-scale industrial production.

Description

technical field [0001] The invention relates to the field of heat-absorbing films for solar heat collectors and photothermal conversion materials, in particular to a color-adjustable solar selective absorbing film system and a preparation method thereof. technical background [0002] With the rapid development of modern society and economy, the human demand for energy is increasing. However, the reserves of traditional energy such as coal, oil, and natural gas continue to decrease and become increasingly scarce, resulting in rising prices. At the same time, the environmental pollution caused by conventional fossil fuels is also becoming more and more serious. These greatly limit the development of society and the improvement of human life quality. . Energy issues have become one of the most prominent issues in the contemporary world. Therefore, seeking new energy sources, especially non-polluting clean energy sources has become a research hotspot. [0003] Solar energy is...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F24J2/48B32B5/00B32B15/01C23C14/06C23C14/08C23C14/35
CPCY02B10/20Y02E10/40
Inventor 陆卫陈飞良王少伟俞立明刘星星简明郭少令陈效双王晓芳
Owner 上海瀚川企业管理咨询有限公司
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