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A preparation method of zno spherical hollow shell structure nanoparticle array

A technology of nanoparticle arrays and empty shells, which is applied in the fields of final product manufacturing, sustainable manufacturing/processing, electrical components, etc., and can solve the problems of low solar photoelectric conversion efficiency and high production costs

Active Publication Date: 2016-03-02
XIAMEN UNIV
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  • Application Information

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Problems solved by technology

[0004] There are two important problems in the production and application of solar cells: one is that the solar photoelectric conversion efficiency is not high; the other is that the production cost is too high

Method used

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  • A preparation method of zno spherical hollow shell structure nanoparticle array
  • A preparation method of zno spherical hollow shell structure nanoparticle array
  • A preparation method of zno spherical hollow shell structure nanoparticle array

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Embodiment

[0057] First, the cleaned silicon thin film solar cell substrate (size: 10mm×10mm cell) is activated for 6 minutes under the RIE system with a power of 80W, and then self-assembled single-layer PS nanospheres (500nm in diameter) are rotated at a low speed Control at 500rpm, spin coating time 10s, high speed 2500rpm, spin coating time 40s. Then put the silicon thin-film solar cell substrate with the single-layer PS nanosphere as the template into the RIE system with a power of 80W to etch for 60s, O 2 The flow rate is 2.0L / min. In the next step, put the above-mentioned treated sample into the magnetron sputtering deposition equipment to sputter the ZnO film. During sputtering, the RF power is 75W, and the ratio of argon and oxygen is 1:1; the substrate is rotated without heating, The pressure is 1 Pa, and the sputtering time is controlled at 24 minutes, so as to ensure that the thickness of the sputtered ZnO film is 50 nm. Finally, the samples of the above sputtered ZnO films...

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Abstract

The invention relates to a production method of a ZnO spherical-empty-shell nanoparticle array and relates to a nanoparticle array. After the surface of a thin-film solar cell is cleaned, the surface of the cell is activated by a reactive ion etching system so as to obtain a hydrophilic-surface thin-film solar cell. A single-layer PS (polystyrene) sphere array is self-assembled on the surface of the thin-film solar cell by spin-coating process. The diameter and gaps of the single-layer polystyrene nanospheres are regulated by the reactive ion etching system so as to obtain a thin-film solar cell with surface single-layer polystyrene nanospheres different in diameter and spacing. A ZnO film is deposited on the surface of the obtained thin-film solar cell, and a polystyrene nanosphere / zinc oxide film nuclear-shell structure is formed on the surface of the solar cell. The obtained thin-film solar cell is annealed in the nitrogen atmosphere, so that the ZnO spherical-empty-shell nanoparticle array is formed on the surface of the solar cell. Photoelectric conversion efficiency of the solar cell is increased.

Description

technical field [0001] The present invention relates to a nanoparticle array. In particular, the invention relates to a preparation method of a ZnO spherical hollow-shell nanoparticle array used on the surface of a solar cell to improve the efficiency of the solar cell. Background technique [0002] When coal, oil and other non-renewable energy resources are frequently running out, and energy issues have increasingly become a bottleneck restricting the development of the international society and economy, more and more countries have begun to implement the "Sunshine Plan" to develop solar energy resources and seek new impetus for economic development. China's energy demand will continue to grow in the long run. At present, China's energy consumption has reached 2.2 billion tons, and it is already facing severe energy security issues and environmental pollution problems. It is a very big challenge to increase the primary energy supply of more than one billion tons in the nex...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L31/18
CPCY02P70/50
Inventor 李静尹君岳闯臧雅姝何绪
Owner XIAMEN UNIV
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